10K Gate I2L and 1K Component Analog Compatible Bipolar VLSI Technology—HIT-2

Katsuyoshi Washio; Tomoyuki Watanabe; Takahiro Okabe; Noboru Horie

doi:10.1109/T-ED.1985.21935

10K Gate I2L and 1K Component Analog Compatible Bipolar VLSI Technology—HIT-2

Katsuyoshi Washio, Tomoyuki Watanabe, Takahiro Okabe, Noboru Horie

Research output: Contribution to journal › Article › peer-review

Abstract

An advanced analog/digital bipolar VLSI technology that combines on the same chip 2-ns 10K I2L gates with 1K analog devices is proposed. The new technology, called high-density integration technology-2 (HIT-2), is based on a new structure concept that consists of three major techniques: shallow grooved-isolation, I2L active layer etching, and I2L current gain increase. I2L circuits with 80-MHz maximum toggle frequency have developed compatibly with n-p-n transistors having a BVCE0 of more than 10 V and an fT of 5 GHz, and lateral p-n-p transistors having an fT of 150 MHz.

Original language	English
Pages (from-to)	237-241
Number of pages	5
Journal	IEEE Transactions on Electron Devices
Volume	32
Issue number	2
DOIs	https://doi.org/10.1109/T-ED.1985.21935
Publication status	Published - 1985 Feb
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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abstract = "An advanced analog/digital bipolar VLSI technology that combines on the same chip 2-ns 10K I2L gates with 1K analog devices is proposed. The new technology, called high-density integration technology-2 (HIT-2), is based on a new structure concept that consists of three major techniques: shallow grooved-isolation, I2L active layer etching, and I2L current gain increase. I2L circuits with 80-MHz maximum toggle frequency have developed compatibly with n-p-n transistors having a BVCE0 of more than 10 V and an fT of 5 GHz, and lateral p-n-p transistors having an fT of 150 MHz.",

author = "Katsuyoshi Washio and Tomoyuki Watanabe and Takahiro Okabe and Noboru Horie",

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10K Gate I2L and 1K Component Analog Compatible Bipolar VLSI Technology—HIT-2

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