@inproceedings{373129376e494310bcb6db7ab15c4003,
title = "3-D calibration of an interference microscope",
abstract = "A simple self-calibration technique is proposed for evaluating linearity errors of an interference microscope in the X- and Y- directions, which result from distortions of the CCD pixel arrays and objective lens. In this self-calibration technique, an inclined flat surface is used as the specimen. Two sets of profile measurement data before and after a small shift of the specimen in the X- or Y- directions are used to obtain the linearity error in each direction.",
keywords = "Accuracy, Interference microscope, Measurement, Non-linearity, Profile, Self-calibration",
author = "Qiang, {Xue Feng} and I Ko and Satoshi Kiyono",
year = "2002",
month = dec,
day = "1",
language = "English",
isbn = "7560317685",
series = "Proceedings of the Second International Symposium on Instrumentation Science and Technology",
editor = "T. Jiubin and W. Xianfang and T. Jiubin and W. Xianfang",
booktitle = "Proceedings of the Second International Symposium on Instrumentation Science and Technology",
note = "Proceedings of the second International Symposium on Instrumentation Science and Technology ; Conference date: 18-08-2002 Through 22-08-2002",
}