TY - JOUR
T1 - 3D imaging of elemental distributions using multi-angle RBS 2D-data
AU - Oishi, Y.
AU - Hotta, K.
AU - Ishii, K.
AU - Komori, Y.
AU - Matsuyama, S.
AU - Yamazaki, H.
AU - Amartivan, Ts
AU - Rodriguez, M.
AU - Katoh, K.
AU - Izukawa, D.
AU - Mizuma, K.
AU - Satoh, T.
AU - Kamiya, T.
AU - Sakai, T.
AU - Arakawa, K.
AU - Saidoh, M.
AU - Oikawa, M.
PY - 2003/9
Y1 - 2003/9
N2 - We developed a novel technique to obtain 3D-imaging of elemental distribution based on multi-angle RBS measurement and micro-beam scanning. Since cross-sections of RBS are too small to obtain 3D-imaging, it is necessary to measure scattered particles with large solid angle detectors. Hence, the RBS profiles from each scattering angle are superposed and a true depth profile cannot be obtained. Recently, a large solid angle X-ray detector array consisting of 45 detector elements was installed at the TIARA facility of Japan Energy Research Institute. Each detector element measures X-rays as well as scattered particles. For this utilization, we introduced a technique to superpose RBS profiles and applied it to the surface analysis of an ant's head.
AB - We developed a novel technique to obtain 3D-imaging of elemental distribution based on multi-angle RBS measurement and micro-beam scanning. Since cross-sections of RBS are too small to obtain 3D-imaging, it is necessary to measure scattered particles with large solid angle detectors. Hence, the RBS profiles from each scattering angle are superposed and a true depth profile cannot be obtained. Recently, a large solid angle X-ray detector array consisting of 45 detector elements was installed at the TIARA facility of Japan Energy Research Institute. Each detector element measures X-rays as well as scattered particles. For this utilization, we introduced a technique to superpose RBS profiles and applied it to the surface analysis of an ant's head.
KW - High-efficiency RBS measurement
KW - Micro-PIXE analysis
KW - Micro-RBS analysis
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U2 - 10.1016/S0168-583X(03)01080-2
DO - 10.1016/S0168-583X(03)01080-2
M3 - Conference article
AN - SCOPUS:0043014932
SN - 0168-583X
VL - 210
SP - 117
EP - 122
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
T2 - 8th International Conference on Nuclear Microprobe Technology
Y2 - 8 September 2002 through 13 September 2002
ER -