TY - GEN
T1 - 3D impact-based ALN/SUS microenergy harvesters for multi-directional and low-frequency vibrations
AU - Van Mink, Le
AU - Igarashi, Suguru
AU - Kuwano, Hiroki
N1 - Funding Information:
The authors would like to thank Japan Science and Technology Agency (JST). This work was supported by JST A-STEP project “AS2815014R”.
Publisher Copyright:
© 2018 IEEE.
PY - 2018/4/24
Y1 - 2018/4/24
N2 - In this study, we developed the novel three-dimensional (3D) impact-based microenergy harvesters for harvesting random vibrations from multiple directions. The device consisted of a 3D box built up from the flexible AlN/SUS-based microcantilevers and the free-moving SUS ball. When the ball receives external vibration energy, it might strike the cantilevers on the surrounding walls and then the device generates electricity. The merit of this configuration is the device could generate the electricity from low frequency and multi-directional vibrations. The developed device provided the peak output power 70 nW on average for the triaxial vibrations at the extremely low frequency of 4.5 Hz which frequency regime is very difficult to be harvested by the published microenergy harvesters.
AB - In this study, we developed the novel three-dimensional (3D) impact-based microenergy harvesters for harvesting random vibrations from multiple directions. The device consisted of a 3D box built up from the flexible AlN/SUS-based microcantilevers and the free-moving SUS ball. When the ball receives external vibration energy, it might strike the cantilevers on the surrounding walls and then the device generates electricity. The merit of this configuration is the device could generate the electricity from low frequency and multi-directional vibrations. The developed device provided the peak output power 70 nW on average for the triaxial vibrations at the extremely low frequency of 4.5 Hz which frequency regime is very difficult to be harvested by the published microenergy harvesters.
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U2 - 10.1109/MEMSYS.2018.8346631
DO - 10.1109/MEMSYS.2018.8346631
M3 - Conference contribution
AN - SCOPUS:85047006989
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 624
EP - 627
BT - 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Y2 - 21 January 2018 through 25 January 2018
ER -