TY - GEN
T1 - 3D profile measurement of nanometer cutting edges of single-point diamond tools for ultra-precision machining
AU - Arai, Y.
AU - Asai, T.
AU - Ferdous, S.
AU - Gao, W.
N1 - Copyright:
Copyright 2010 Elsevier B.V., All rights reserved.
PY - 2009
Y1 - 2009
N2 - This paper describes an atomic force microscope (AFM) based instrument for 3D edge profile measurement of single-point diamond cutting tools. The instrument is composed of an AFM unit and an optical sensor for alignment of the AFM probe tip (silicon cantilever) with the diamond cutting tool edge. In the optical sensor, a laser beam from a laser diode along the Y-axis is focused to generate a small beam spot with a micrometer-order diameter at the beam waist, and then received by a photo-detector (photodiode). The tool edge top and the AFM probe tip are brought to the center of the beam waist in the XZ-plane through monitoring the variation of the photodiode output, respectively. Consequently, the AFM tip can be aligned with the tool edge top. Alignment experiments and 3D edge profile measurements of a round-nose type single-point diamond tool are carried out.
AB - This paper describes an atomic force microscope (AFM) based instrument for 3D edge profile measurement of single-point diamond cutting tools. The instrument is composed of an AFM unit and an optical sensor for alignment of the AFM probe tip (silicon cantilever) with the diamond cutting tool edge. In the optical sensor, a laser beam from a laser diode along the Y-axis is focused to generate a small beam spot with a micrometer-order diameter at the beam waist, and then received by a photo-detector (photodiode). The tool edge top and the AFM probe tip are brought to the center of the beam waist in the XZ-plane through monitoring the variation of the photodiode output, respectively. Consequently, the AFM tip can be aligned with the tool edge top. Alignment experiments and 3D edge profile measurements of a round-nose type single-point diamond tool are carried out.
KW - AFM
KW - Diamond cutting tool
KW - Edge profile
KW - Measurement
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U2 - 10.4028/www.scientific.net/AMR.69-70.138
DO - 10.4028/www.scientific.net/AMR.69-70.138
M3 - Conference contribution
AN - SCOPUS:70350490515
SN - 0878493263
SN - 9780878493265
T3 - Advanced Materials Research
SP - 138
EP - 142
BT - 8th CHINA-JAPAN International Conference on Ultra-Precision Machining, CJICUPM2008
T2 - CHINA-JAPAN International Conference on Ultra-Precision Machining, CJICUPM2008
Y2 - 24 November 2008 through 25 November 2008
ER -