9.5 GHz Solidly Mounted Bulk Acoustic Wave Resonator using Third Overtone of Thickness Extension Mode in LiNbO3

Michio Kadota, Fuyuko Yamashita, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

5 Citations (Scopus)

Abstract

This paper reports a new method to preferentially excite the third overtone response for a solidly-mounted-BAW resonator (SM-BAWR). By FEM simulation, it was found that λ/20 layer thickness of a Bragg reflector was suitable for the excitation of the third overtone (λ is the wavelength of the fundamental mode in a piezoelectric layer). The SM-BAWR was fabricated using a 1 μm thick 36°Y LiNbO3 plate and 4 pairs of SiO2 and Ta as the Bragg reflector. A 9.5 GHz third overtone response was more strongly observed than the fundamental mode, and the impedance ratio was as high as 31 dB.

Original languageEnglish
Title of host publicationIUS 2022 - IEEE International Ultrasonics Symposium
PublisherIEEE Computer Society
ISBN (Electronic)9781665466578
DOIs
Publication statusPublished - 2022
Event2022 IEEE International Ultrasonics Symposium, IUS 2022 - Venice, Italy
Duration: 2022 Oct 102022 Oct 13

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2022-October
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Conference

Conference2022 IEEE International Ultrasonics Symposium, IUS 2022
Country/TerritoryItaly
CityVenice
Period22/10/1022/10/13

Keywords

  • Bragg reflector
  • LiNbO3
  • Solidly-mounted BAW resonator
  • third overtone

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