A 3-D MEMS optical switch for OXCs

T. Yamamoto, J. Yamaguchi, N. Takeuchi, A. Shimizu, E. Higurashi, R. Sawada, Y. Uenishi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


A large-scale, compact optical switch based on MEMS-tilt mirror arrays and free-space optics is described. The mirror fabricated by the SOI-bulk micromachining technology provides reliable switching, and the optics consists of low-cost, high-accurate polymer components. A prototype with 100-ch I/Os features a coupling loss of 4.0dB and switching time of 3ms.

Original languageEnglish
Title of host publicationFrontiers in Optics, FiO 2003
PublisherOptica Publishing Group (formerly OSA)
ISBN (Electronic)1557527598
Publication statusPublished - 2003
EventFrontiers in Optics, FiO 2003 - Tucson, United States
Duration: 2003 Oct 5 → …

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701


ConferenceFrontiers in Optics, FiO 2003
Country/TerritoryUnited States
Period03/10/5 → …


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