A bakable microvalve with a Kovar-glass-silicon-glass structure

Dong Youn Sim; Toru Kurabayashi; Masayoshi Esashi

doi:10.1088/0960-1317/6/2/009

A bakable microvalve with a Kovar-glass-silicon-glass structure

Dong Youn Sim, Toru Kurabayashi, Masayoshi Esashi

Micro System Integration Center (μSIC)

Research output: Contribution to journal › Article › peer-review

28 Citations (Scopus)

Abstract

A new bakable pneumatic silicon microvalve has been developed by micromachining for advanced semiconductor device fabrication. This microvalve is composed of an anodically bonded glass-silicon-glass structure and it is further bonded to a Kovar alloy block which has stainless steel tubes. The gas flow rate could be controlled from 0.5 sccm to 50 sccm at an inlet pressure of 0.26 kgf cm^-2. This microvalve can be used in the temperature range from 25 to 120°C.

Original language	English
Pages (from-to)	266-271
Number of pages	6
Journal	Journal of Micromechanics and Microengineering
Volume	6
Issue number	2
DOIs	https://doi.org/10.1088/0960-1317/6/2/009
Publication status	Published - 1996 Jun 1

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/0960-1317/6/2/009

Cite this

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abstract = "A new bakable pneumatic silicon microvalve has been developed by micromachining for advanced semiconductor device fabrication. This microvalve is composed of an anodically bonded glass-silicon-glass structure and it is further bonded to a Kovar alloy block which has stainless steel tubes. The gas flow rate could be controlled from 0.5 sccm to 50 sccm at an inlet pressure of 0.26 kgf cm-2. This microvalve can be used in the temperature range from 25 to 120°C.",

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AB - A new bakable pneumatic silicon microvalve has been developed by micromachining for advanced semiconductor device fabrication. This microvalve is composed of an anodically bonded glass-silicon-glass structure and it is further bonded to a Kovar alloy block which has stainless steel tubes. The gas flow rate could be controlled from 0.5 sccm to 50 sccm at an inlet pressure of 0.26 kgf cm-2. This microvalve can be used in the temperature range from 25 to 120°C.

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A bakable microvalve with a Kovar-glass-silicon-glass structure

Abstract

ASJC Scopus subject areas

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