A CMOS Proximity Capacitance Image Sensor with 16μ m Pixel Pitch, 0.1aF Detection Accuracy and 60 Frames per Second

M. Yamamoto; R. Kuroda; M. Suzuki; T. Goto; H. Hamori; S. Murakami; T. Yasuda; S. Sugawa

doi:10.1109/IEDM.2018.8614636

A CMOS Proximity Capacitance Image Sensor with 16μ m Pixel Pitch, 0.1aF Detection Accuracy and 60 Frames per Second

M. Yamamoto, R. Kuroda, M. Suzuki, T. Goto, H. Hamori, S. Murakami, T. Yasuda, S. Sugawa

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A 16μ m pixel pitch 60 frames per second CMOS proximity capacitance image sensor fabricated by a 0.18μ m CMOS process technology is presented. By the introduction of noise cancelling operation, both fixed pattern noise and kTC noise are significantly reduced, resulting in the 0.1aF (10 ^-19 F) detection accuracy. Proximity capacitance imaging results using the developed sensor are also demonstrated.

Original language	English
Title of host publication	2018 IEEE International Electron Devices Meeting, IEDM 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	29.1.1-29.1.4
ISBN (Electronic)	9781728119878
DOIs	https://doi.org/10.1109/IEDM.2018.8614636
Publication status	Published - 2019 Jan 16
Event	64th Annual IEEE International Electron Devices Meeting, IEDM 2018 - San Francisco, United States Duration: 2018 Dec 1 → 2018 Dec 5

Publication series

Name	Technical Digest - International Electron Devices Meeting, IEDM
Volume	2018-December
ISSN (Print)	0163-1918

Conference

Conference	64th Annual IEEE International Electron Devices Meeting, IEDM 2018
Country/Territory	United States
City	San Francisco
Period	18/12/1 → 18/12/5

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Materials Chemistry
Electrical and Electronic Engineering

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10.1109/IEDM.2018.8614636

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Yamamoto, M., Kuroda, R., Suzuki, M., Goto, T., Hamori, H., Murakami, S., Yasuda, T., & Sugawa, S. (2019). A CMOS Proximity Capacitance Image Sensor with 16μ m Pixel Pitch, 0.1aF Detection Accuracy and 60 Frames per Second. In 2018 IEEE International Electron Devices Meeting, IEDM 2018 (pp. 29.1.1-29.1.4). [8614636] (Technical Digest - International Electron Devices Meeting, IEDM; Vol. 2018-December). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IEDM.2018.8614636

A CMOS Proximity Capacitance Image Sensor with 16μ m Pixel Pitch, 0.1aF Detection Accuracy and 60 Frames per Second. / Yamamoto, M.; Kuroda, R.; Suzuki, M. et al.

2018 IEEE International Electron Devices Meeting, IEDM 2018. Institute of Electrical and Electronics Engineers Inc., 2019. p. 29.1.1-29.1.4 8614636 (Technical Digest - International Electron Devices Meeting, IEDM; Vol. 2018-December).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yamamoto, M, Kuroda, R, Suzuki, M, Goto, T, Hamori, H, Murakami, S, Yasuda, T & Sugawa, S 2019, A CMOS Proximity Capacitance Image Sensor with 16μ m Pixel Pitch, 0.1aF Detection Accuracy and 60 Frames per Second. in 2018 IEEE International Electron Devices Meeting, IEDM 2018., 8614636, Technical Digest - International Electron Devices Meeting, IEDM, vol. 2018-December, Institute of Electrical and Electronics Engineers Inc., pp. 29.1.1-29.1.4, 64th Annual IEEE International Electron Devices Meeting, IEDM 2018, San Francisco, United States, 18/12/1. https://doi.org/10.1109/IEDM.2018.8614636

Yamamoto M, Kuroda R, Suzuki M, Goto T, Hamori H, Murakami S et al. A CMOS Proximity Capacitance Image Sensor with 16μ m Pixel Pitch, 0.1aF Detection Accuracy and 60 Frames per Second. In 2018 IEEE International Electron Devices Meeting, IEDM 2018. Institute of Electrical and Electronics Engineers Inc. 2019. p. 29.1.1-29.1.4. 8614636. (Technical Digest - International Electron Devices Meeting, IEDM). doi: 10.1109/IEDM.2018.8614636

Yamamoto, M. ; Kuroda, R. ; Suzuki, M. et al. / A CMOS Proximity Capacitance Image Sensor with 16μ m Pixel Pitch, 0.1aF Detection Accuracy and 60 Frames per Second. 2018 IEEE International Electron Devices Meeting, IEDM 2018. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 29.1.1-29.1.4 (Technical Digest - International Electron Devices Meeting, IEDM).

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A CMOS Proximity Capacitance Image Sensor with 16μ m Pixel Pitch, 0.1aF Detection Accuracy and 60 Frames per Second

Abstract

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