Abstract
An optical configuration for a confocal microscope employing a mode-locked laser source is proposed in this paper. Due to high illumination efficiency and a highly stable optical frequency of the mode-locked laser, which is traceable with the national standard of frequency and time, the proposed chromatic confocal microscope is expected to achieve a high axial resolution. In this paper, as a first step of research, design study on the optical setup for the prototype chromatic confocal microscope with the mode-locked laser is carried out.
Original language | English |
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Publication status | Published - 2017 Nov 13 |
Event | 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 - Hiroshima City, Japan Duration: 2017 Nov 13 → 2017 Nov 17 |
Other
Other | 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 |
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Country/Territory | Japan |
City | Hiroshima City |
Period | 17/11/13 → 17/11/17 |
Keywords
- Confocal probe
- Light source
- Mode-locked laser
- Precision measurement
ASJC Scopus subject areas
- Industrial and Manufacturing Engineering