A confocal microscope with a mode-locked laser source

Yuki Shimizu, Taku Nakamura, Yuanliu Chen, Wei Gao

Research output: Contribution to conferencePaperpeer-review

Abstract

An optical configuration for a confocal microscope employing a mode-locked laser source is proposed in this paper. Due to high illumination efficiency and a highly stable optical frequency of the mode-locked laser, which is traceable with the national standard of frequency and time, the proposed chromatic confocal microscope is expected to achieve a high axial resolution. In this paper, as a first step of research, design study on the optical setup for the prototype chromatic confocal microscope with the mode-locked laser is carried out.

Original languageEnglish
Publication statusPublished - 2017 Nov 13
Event9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 - Hiroshima City, Japan
Duration: 2017 Nov 132017 Nov 17

Other

Other9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017
Country/TerritoryJapan
CityHiroshima City
Period17/11/1317/11/17

Keywords

  • Confocal probe
  • Light source
  • Mode-locked laser
  • Precision measurement

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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