TY - JOUR
T1 - A correction of measurement for complex magnetic permeability by direct contact probe
AU - Wang, Z.
AU - Ishihara, T.
AU - Okita, K.
AU - Yabukami, S.
N1 - Funding Information:
This work was supported in part by the Business Incubation Program (BIP) of Tohoku University, research and development for expansion of radio wave resources from the Ministry of Internal Affairs and Communications (JPJ000254), KIOXIA Corporation, and NEDO Entrepreneurs Program (0329006).
Funding Information:
Acknowledgments This work was supported in part by the Business Incubation rP ogram (BI)P of Tohoku University, research and development for expansion of radio wave resources from the Ministry of Internal Affairs and Communications (JJP 000254), KIOXIA Corporation, and NEDO Entrepreneurs rP ogram (0329006).
Publisher Copyright:
© 2022, Magnetics Society of Japan. All rights reserved.
PY - 2022
Y1 - 2022
N2 - A method for obtaining magnetic permeability of thin film by the direct contact probe was developed and the measurement error of permeability was reduced. We analyzed the frequency dependence of a current path inside the magnetic thin film using by finite element method. The magnetic permeability was corrected in consideration of the frequency dependence of the high-frequency current inside the magnetic thin film. The permeability of CoNbZr film (5 mm x 5 mm, 2 μm in thickness) was optimized by the method, and measured permeability was roughly agreed with the theoretical value up to 4 GHz.
AB - A method for obtaining magnetic permeability of thin film by the direct contact probe was developed and the measurement error of permeability was reduced. We analyzed the frequency dependence of a current path inside the magnetic thin film using by finite element method. The magnetic permeability was corrected in consideration of the frequency dependence of the high-frequency current inside the magnetic thin film. The permeability of CoNbZr film (5 mm x 5 mm, 2 μm in thickness) was optimized by the method, and measured permeability was roughly agreed with the theoretical value up to 4 GHz.
KW - Complex permeability
KW - Current path
KW - Direct contact probe
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U2 - 10.3379/msjmag.2207R002
DO - 10.3379/msjmag.2207R002
M3 - Article
AN - SCOPUS:85133844319
SN - 1882-2932
VL - 46
SP - 85
EP - 89
JO - Journal of the Magnetics Society of Japan
JF - Journal of the Magnetics Society of Japan
IS - 4
ER -