TY - JOUR
T1 - A design of highly sensitive GMI sensor
AU - Yabukami, S.
AU - Mawatari, H.
AU - Horikoshi, N.
AU - Murayama, Y.
AU - Ozawa, T.
AU - Ishiyama, K.
AU - Arai, K. I.
N1 - Funding Information:
A part of this research was supported by scientific research fund from the Ministry of Welfare of Japan (16206041).
PY - 2005/4
Y1 - 2005/4
N2 - Employing amplitude-modulation technique, we have optimized the giant magnetoimpedance (GMI) sensor. Our approach was to optimize the sensor structure so as to obtain a high signal-to-noise ratio by using finite element analysis. The optimum size of sensor strip is as follows: a thickness of 4.3 μm, a strip width of 20-30 μm, a length of several mm. The meander sensor element [CoNbZr (thickness, 4.3 μm; length, 5 mm; width, 30 μm; number of turns, 3) was fabricated using the lift-off process. A high impedance change over 200% was obtained at several hundred MHz. When a small AC magnetic field was applied to the sensor element, a very small AM signal was detected by the sensor system in a magnetically shielded room. A resolution of 1.7×10-8 Oe/Hz1/2 was obtained at 501 kHz.
AB - Employing amplitude-modulation technique, we have optimized the giant magnetoimpedance (GMI) sensor. Our approach was to optimize the sensor structure so as to obtain a high signal-to-noise ratio by using finite element analysis. The optimum size of sensor strip is as follows: a thickness of 4.3 μm, a strip width of 20-30 μm, a length of several mm. The meander sensor element [CoNbZr (thickness, 4.3 μm; length, 5 mm; width, 30 μm; number of turns, 3) was fabricated using the lift-off process. A high impedance change over 200% was obtained at several hundred MHz. When a small AC magnetic field was applied to the sensor element, a very small AM signal was detected by the sensor system in a magnetically shielded room. A resolution of 1.7×10-8 Oe/Hz1/2 was obtained at 501 kHz.
KW - Finite element method
KW - Magnetic field
KW - Sensors
KW - Skin effect
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U2 - 10.1016/j.jmmm.2004.11.427
DO - 10.1016/j.jmmm.2004.11.427
M3 - Article
AN - SCOPUS:15044347225
SN - 0304-8853
VL - 290-291 PART 2
SP - 1318
EP - 1321
JO - Journal of Magnetism and Magnetic Materials
JF - Journal of Magnetism and Magnetic Materials
ER -