TY - JOUR
T1 - A Design Study of a Heat Flow-Type Reading Head for a Linear Encoder Based on a Micro Thermal Sensor
AU - Shimizu, Yuki
AU - Ishida, Ayaka
AU - Matsuno, Yuki
AU - Matsukuma, Hiraku
AU - Gao, Wei
N1 - Funding Information:
This research is supported by Japan Society for the Promotion of Science (JSPS).
Publisher Copyright:
© 2019, International Society for Nanomanufacturing and Tianjin University and Springer Nature Singapore Pte Ltd.
PY - 2019/6/1
Y1 - 2019/6/1
N2 - A new concept of reading head for a linear encoder, in which graduations on a scale grating are read by using a micro thermal sensor composed of a thin film resistor, is proposed to realize a compact encoder system. In the proposed reading head, measurement of the in-plane relative displacement between the micro thermal sensor and the scale grating will be carried out in such a way that the graduations on a scale grating are read by the micro thermal sensor through the change in the heat flow between the sensor and the scale grating surface. In this paper, as the first step of research, theoretical calculations based on the theory of heat flow between the sensor and scale interface are carried out. In addition, basic experiments are carried out to search for the possibility of realizing the proposed concept of the reading head based on the micro thermal sensor.
AB - A new concept of reading head for a linear encoder, in which graduations on a scale grating are read by using a micro thermal sensor composed of a thin film resistor, is proposed to realize a compact encoder system. In the proposed reading head, measurement of the in-plane relative displacement between the micro thermal sensor and the scale grating will be carried out in such a way that the graduations on a scale grating are read by the micro thermal sensor through the change in the heat flow between the sensor and the scale grating surface. In this paper, as the first step of research, theoretical calculations based on the theory of heat flow between the sensor and scale interface are carried out. In addition, basic experiments are carried out to search for the possibility of realizing the proposed concept of the reading head based on the micro thermal sensor.
KW - Displacement measurement
KW - Linear encoder
KW - Micro thermal sensor
KW - Positioning
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U2 - 10.1007/s41871-019-00037-3
DO - 10.1007/s41871-019-00037-3
M3 - Article
AN - SCOPUS:85071674764
SN - 2520-811X
VL - 2
SP - 100
EP - 110
JO - Nanomanufacturing and Metrology
JF - Nanomanufacturing and Metrology
IS - 2
ER -