A DLC/W-DLC multilayered structure for strain sensing applications

Takanori Takeno; Hiroyuki Miki; Toshifumi Sugawara; Yuhtaro Hoshi; Toshiyuki Takagi

doi:10.1016/j.diamond.2007.10.005

A DLC/W-DLC multilayered structure for strain sensing applications

Takanori Takeno, Hiroyuki Miki, Toshifumi Sugawara, Yuhtaro Hoshi, Toshiyuki Takagi

Tohoku University

Research output: Contribution to journal › Article › peer-review

33 Citations (Scopus)

Abstract

The strain dependence in tungsten-containing diamond-like carbon (W-DLC) film was investigated. The W-DLC film was deposited onto Si substrate by plasma enhanced chemical vapor deposition and DC magnetron co-sputtering of tungsten metal target. The strain dependence of resistance was measured by four-point bending test under well controlled temperature condition. The observed dependence was linear one and calculated gauge factor is 6.1. The high value of the gauge factor is originated from the piezoresistive effect. In addition, double layered structure of DLC/W-DLC film was fabricated. The double layerness and interface structure were investigated by transmission electron microscope. No clear boundary between DLC and W-DLC was observed. This was because of the continuous carbon matrix from the bottom layer of W-DLC to top DLC layer.

Original language	English
Pages (from-to)	713-716
Number of pages	4
Journal	Diamond and Related Materials
Volume	17
Issue number	4-5
DOIs	https://doi.org/10.1016/j.diamond.2007.10.005
Publication status	Published - 2008 Apr

Keywords

DLC
Double layered film
Strain sensor

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10.1016/j.diamond.2007.10.005

Cite this

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title = "A DLC/W-DLC multilayered structure for strain sensing applications",

abstract = "The strain dependence in tungsten-containing diamond-like carbon (W-DLC) film was investigated. The W-DLC film was deposited onto Si substrate by plasma enhanced chemical vapor deposition and DC magnetron co-sputtering of tungsten metal target. The strain dependence of resistance was measured by four-point bending test under well controlled temperature condition. The observed dependence was linear one and calculated gauge factor is 6.1. The high value of the gauge factor is originated from the piezoresistive effect. In addition, double layered structure of DLC/W-DLC film was fabricated. The double layerness and interface structure were investigated by transmission electron microscope. No clear boundary between DLC and W-DLC was observed. This was because of the continuous carbon matrix from the bottom layer of W-DLC to top DLC layer.",

keywords = "DLC, Double layered film, Strain sensor",

author = "Takanori Takeno and Hiroyuki Miki and Toshifumi Sugawara and Yuhtaro Hoshi and Toshiyuki Takagi",

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TY - JOUR

T1 - A DLC/W-DLC multilayered structure for strain sensing applications

AU - Takeno, Takanori

AU - Miki, Hiroyuki

AU - Sugawara, Toshifumi

AU - Hoshi, Yuhtaro

AU - Takagi, Toshiyuki

PY - 2008/4

Y1 - 2008/4

N2 - The strain dependence in tungsten-containing diamond-like carbon (W-DLC) film was investigated. The W-DLC film was deposited onto Si substrate by plasma enhanced chemical vapor deposition and DC magnetron co-sputtering of tungsten metal target. The strain dependence of resistance was measured by four-point bending test under well controlled temperature condition. The observed dependence was linear one and calculated gauge factor is 6.1. The high value of the gauge factor is originated from the piezoresistive effect. In addition, double layered structure of DLC/W-DLC film was fabricated. The double layerness and interface structure were investigated by transmission electron microscope. No clear boundary between DLC and W-DLC was observed. This was because of the continuous carbon matrix from the bottom layer of W-DLC to top DLC layer.

AB - The strain dependence in tungsten-containing diamond-like carbon (W-DLC) film was investigated. The W-DLC film was deposited onto Si substrate by plasma enhanced chemical vapor deposition and DC magnetron co-sputtering of tungsten metal target. The strain dependence of resistance was measured by four-point bending test under well controlled temperature condition. The observed dependence was linear one and calculated gauge factor is 6.1. The high value of the gauge factor is originated from the piezoresistive effect. In addition, double layered structure of DLC/W-DLC film was fabricated. The double layerness and interface structure were investigated by transmission electron microscope. No clear boundary between DLC and W-DLC was observed. This was because of the continuous carbon matrix from the bottom layer of W-DLC to top DLC layer.

KW - DLC

KW - Double layered film

KW - Strain sensor

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A DLC/W-DLC multilayered structure for strain sensing applications

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Keywords

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