A double-focus lens interferometer for scanning force microscopy

Kazuya Goto; Minoru Sasaki; Shigeru Okuma; Kazuhiro Hane

doi:10.1063/1.1145548

A double-focus lens interferometer for scanning force microscopy

Kazuya Goto, Minoru Sasaki, Shigeru Okuma, Kazuhiro Hane

New Industry Creation Hatchery Center (NICHe)

Nagoya University

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

We present a laser interferometer for displacement measurement requiring high precision. Consisting of a small number of optical parts, the instrument is simple, compact, and not affected by environmental conditions. Further, with a birefringent double-focus lens, the two interfering beams share a common path and the interference signal is immune to fluctuations of the optical path length. Peak-to-peak noise in a dc to 1 kHz bandwidth is less than 0.02 Å. We applied this interferometer to scanning force microscopy and tested the performance.

Original language	English
Pages (from-to)	3182-3185
Number of pages	4
Journal	Review of Scientific Instruments
Volume	66
Issue number	5
DOIs	https://doi.org/10.1063/1.1145548
Publication status	Published - 1995

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10.1063/1.1145548

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AB - We present a laser interferometer for displacement measurement requiring high precision. Consisting of a small number of optical parts, the instrument is simple, compact, and not affected by environmental conditions. Further, with a birefringent double-focus lens, the two interfering beams share a common path and the interference signal is immune to fluctuations of the optical path length. Peak-to-peak noise in a dc to 1 kHz bandwidth is less than 0.02 Å. We applied this interferometer to scanning force microscopy and tested the performance.

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A double-focus lens interferometer for scanning force microscopy

Abstract

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