Abstract
A thin film actuator of a ferromagnetic shape memory alloy (FSMA) is presented allowing two degrees of freedom (2D) control of a bulk micromirror. The actuation mechanism is based on a simultaneous ferromagnetic and martensitic transformation. The movable parts of the actuator are designed as a monolithic device with two thermally and magnetically decoupled actuation units, which is demonstrated by coupled finite element simulations. The problem of FSMA thin film integration is solved by a novel transfer bonding process. First demonstrators of the FSMA actuator show a highly nonlinear response at low actuation voltage allowing large optical scanning angles up to 65° at tuneable frequencies.
| Original language | English |
|---|---|
| Pages (from-to) | 92-98 |
| Number of pages | 7 |
| Journal | Sensors and Actuators, A: Physical |
| Volume | 135 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2007 Mar 30 |
Keywords
- Microscanner
- NiMnGa thin films
- Shape memory actuator
- Smart materials
- Sputter deposition
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering