A ferromagnetic shape memory actuator designed for large 2D optical scanning

M. Kohl, D. Brugger, M. Ohtsuka, B. Krevet

Research output: Contribution to journalArticlepeer-review

31 Citations (Scopus)


A thin film actuator of a ferromagnetic shape memory alloy (FSMA) is presented allowing two degrees of freedom (2D) control of a bulk micromirror. The actuation mechanism is based on a simultaneous ferromagnetic and martensitic transformation. The movable parts of the actuator are designed as a monolithic device with two thermally and magnetically decoupled actuation units, which is demonstrated by coupled finite element simulations. The problem of FSMA thin film integration is solved by a novel transfer bonding process. First demonstrators of the FSMA actuator show a highly nonlinear response at low actuation voltage allowing large optical scanning angles up to 65° at tuneable frequencies.

Original languageEnglish
Pages (from-to)92-98
Number of pages7
JournalSensors and Actuators, A: Physical
Issue number1
Publication statusPublished - 2007 Mar 30


  • Microscanner
  • NiMnGa thin films
  • Shape memory actuator
  • Smart materials
  • Sputter deposition

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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