@inproceedings{c41eb13c2c3d4418bd44f63397f8ffd8,
title = "A glass tube micro-stylus probe for surface form metrology",
abstract = "This paper presents a micro-stylus probe, which is composed of a precision glass micro-ball and a shaft made by a glass tube. The diameter of the micro-ball was 50 μm. The tip angle of the glass-tube shaft was approximately 10 degrees. Strength test shows that the tolerance of glass tube micro-stylus against external forces is 90 mN. To reduce the stick-slip phenomena, a micro-tapping probe employing the glass tube micro-stylus and a PZT actuator was demonstrated. The micro-stylus probe was mounted to an air-bearing displacement sensor for scanning surface form metrology. Experimental results showed that the micro-tapping probe was effective for reducing the influence of the stick-slip phenomena.",
keywords = "micro-probe, micro-stylus, scanning, shaft, surface form",
author = "Bin Xu and Yuki Shimizu and Wei Gao",
year = "2011",
doi = "10.1117/12.904875",
language = "English",
isbn = "9780819479402",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Seventh International Symposium on Precision Engineering Measurements and Instrumentation",
note = "7th International Symposium on Precision Engineering Measurements and Instrumentation ; Conference date: 07-08-2011 Through 11-08-2011",
}