A high-sensitivity active magnetic probe using CMOS integrated circuits technology

Satoshi Aoyama, Shoji Kawahito, Takeshi Yasui, Masahiro Yamaguchi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

18 Citations (Scopus)

Abstract

A novel magnetic probe has been designed and fabricated in CMOS-SOI technology. Testing results show, for the first time, the effectiveness of the active magnetic probe with on-chip amplification, electric field suppression, and electrical switching.

Original languageEnglish
Title of host publication14th Topical Meeting on Electrical Performance of Electronic Packaging 2005
Pages103-106
Number of pages4
DOIs
Publication statusPublished - 2005
Event14th Topical Meeting on Electrical Performance of Electronic Packaging 2005 - Austin, TX, United States
Duration: 2005 Oct 242005 Oct 26

Publication series

NameIEEE Topical Meeting on Electrical Performance of Electronic Packaging
Volume2005

Conference

Conference14th Topical Meeting on Electrical Performance of Electronic Packaging 2005
Country/TerritoryUnited States
CityAustin, TX
Period05/10/2405/10/26

Keywords

  • Active magnetic probe
  • CMOS-SOI
  • Near field measurement

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