A high sensitivity compact gas concentration sensor using UV light and charge amplifier circuit

Hidekazu Ishii; Masaaki Nagase; Nobukazu Ikeda; Yoshinobu Shiba; Yasuyuki Shirai; Rihito Kuroda; Shigetoshi Sugawa

doi:10.1109/ICSENS.2016.7808698

A high sensitivity compact gas concentration sensor using UV light and charge amplifier circuit

Hidekazu Ishii, Masaaki Nagase, Nobukazu Ikeda, Yoshinobu Shiba, Yasuyuki Shirai, Rihito Kuroda, Shigetoshi Sugawa

New Industry Creation Hatchery Center (NICHe)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Citations (Scopus)

Abstract

A high sensitivity compact gas concentration sensor based on the ultraviolet (UV) light absorption spectrophotometry employing charge amplifier circuit is developed in this work as inline gas concentration monitoring system for electronic device manufacturing lines. The developed sensor was verified to be useful for concentration monitoring of metal organic (MO) gases including Bis(cyclopentadienyl)magnesium(Cp2Mg) with a high accuracy and a high reproducibility for 10ppm to 0.036% concentration range, where there was no in-line gas concentration sensor sufficiently applicable to this gas before.

Original language	English
Title of host publication	IEEE Sensors, SENSORS 2016 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781479982875
DOIs	https://doi.org/10.1109/ICSENS.2016.7808698
Publication status	Published - 2016 Jan 5
Event	15th IEEE Sensors Conference, SENSORS 2016 - Orlando, United States Duration: 2016 Oct 30 → 2016 Nov 2

Publication series

Name	Proceedings of IEEE Sensors
Volume	0
ISSN (Print)	1930-0395
ISSN (Electronic)	2168-9229

Conference

Conference	15th IEEE Sensors Conference, SENSORS 2016
Country/Territory	United States
City	Orlando
Period	16/10/30 → 16/11/2

Keywords

charge amplifier circuit
gas concentration sensor
metal organic gas

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10.1109/ICSENS.2016.7808698

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Ishii, H., Nagase, M., Ikeda, N., Shiba, Y., Shirai, Y., Kuroda, R., & Sugawa, S. (2016). A high sensitivity compact gas concentration sensor using UV light and charge amplifier circuit. In IEEE Sensors, SENSORS 2016 - Proceedings Article 7808698 (Proceedings of IEEE Sensors; Vol. 0). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICSENS.2016.7808698

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title = "A high sensitivity compact gas concentration sensor using UV light and charge amplifier circuit",

abstract = "A high sensitivity compact gas concentration sensor based on the ultraviolet (UV) light absorption spectrophotometry employing charge amplifier circuit is developed in this work as inline gas concentration monitoring system for electronic device manufacturing lines. The developed sensor was verified to be useful for concentration monitoring of metal organic (MO) gases including Bis(cyclopentadienyl)magnesium(Cp2Mg) with a high accuracy and a high reproducibility for 10ppm to 0.036% concentration range, where there was no in-line gas concentration sensor sufficiently applicable to this gas before.",

keywords = "charge amplifier circuit, gas concentration sensor, metal organic gas",

author = "Hidekazu Ishii and Masaaki Nagase and Nobukazu Ikeda and Yoshinobu Shiba and Yasuyuki Shirai and Rihito Kuroda and Shigetoshi Sugawa",

note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 15th IEEE Sensors Conference, SENSORS 2016 ; Conference date: 30-10-2016 Through 02-11-2016",

year = "2016",

month = jan,

day = "5",

doi = "10.1109/ICSENS.2016.7808698",

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Ishii, H, Nagase, M, Ikeda, N, Shiba, Y, Shirai, Y , Kuroda, R & Sugawa, S 2016, A high sensitivity compact gas concentration sensor using UV light and charge amplifier circuit. in IEEE Sensors, SENSORS 2016 - Proceedings., 7808698, Proceedings of IEEE Sensors, vol. 0, Institute of Electrical and Electronics Engineers Inc., 15th IEEE Sensors Conference, SENSORS 2016, Orlando, United States, 16/10/30. https://doi.org/10.1109/ICSENS.2016.7808698

A high sensitivity compact gas concentration sensor using UV light and charge amplifier circuit. / Ishii, Hidekazu; Nagase, Masaaki; Ikeda, Nobukazu et al.
IEEE Sensors, SENSORS 2016 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2016. 7808698 (Proceedings of IEEE Sensors; Vol. 0).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Ishii, Hidekazu

AU - Nagase, Masaaki

AU - Ikeda, Nobukazu

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AU - Shirai, Yasuyuki

AU - Kuroda, Rihito

AU - Sugawa, Shigetoshi

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N2 - A high sensitivity compact gas concentration sensor based on the ultraviolet (UV) light absorption spectrophotometry employing charge amplifier circuit is developed in this work as inline gas concentration monitoring system for electronic device manufacturing lines. The developed sensor was verified to be useful for concentration monitoring of metal organic (MO) gases including Bis(cyclopentadienyl)magnesium(Cp2Mg) with a high accuracy and a high reproducibility for 10ppm to 0.036% concentration range, where there was no in-line gas concentration sensor sufficiently applicable to this gas before.

AB - A high sensitivity compact gas concentration sensor based on the ultraviolet (UV) light absorption spectrophotometry employing charge amplifier circuit is developed in this work as inline gas concentration monitoring system for electronic device manufacturing lines. The developed sensor was verified to be useful for concentration monitoring of metal organic (MO) gases including Bis(cyclopentadienyl)magnesium(Cp2Mg) with a high accuracy and a high reproducibility for 10ppm to 0.036% concentration range, where there was no in-line gas concentration sensor sufficiently applicable to this gas before.

KW - charge amplifier circuit

KW - gas concentration sensor

KW - metal organic gas

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M3 - Conference contribution

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T3 - Proceedings of IEEE Sensors

BT - IEEE Sensors, SENSORS 2016 - Proceedings

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A high sensitivity compact gas concentration sensor using UV light and charge amplifier circuit

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