A light-in light-out micro mirror device

Yuko Yamauchi; Akio Higo; Kuniyuki Kakushima; Hiroyuki Fujita; Hiroshi Toshiyoshi

doi:10.1109/SENSOR.2005.1497287

A light-in light-out micro mirror device

Yuko Yamauchi, Akio Higo, Kuniyuki Kakushima, Hiroyuki Fujita, Hiroshi Toshiyoshi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

In this paper, we report a new concept of optical MEMS (Micro Electro Mechanical System) devices that could be operated by the incident light and to operate yet another light beam; in other words, a light beam is controlled by another light beam through an optical MEMS mirror. A photodiode and an electrostatic micro mirror are integrated into an SOI (silicon-on-insulator) wafer, whose circuit diagram is equivalent to that of a photocoupler. The mechanism can be used for free-space optical computing and optically-addressed fiber optic crossconnect.

Original language	English
Title of host publication	TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages	1175-1178
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2005.1497287
Publication status	Published - 2005
Event	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: 2005 Jun 5 → 2005 Jun 9

Publication series

Name	Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume	2

Other

Other	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Country/Territory	Korea, Republic of
City	Seoul
Period	05/6/5 → 05/6/9

Keywords

Electrostatic actuator
Micro mirror
Optical MEMS
Photodiode

ASJC Scopus subject areas

Engineering(all)

Access to Document

10.1109/SENSOR.2005.1497287

Cite this

Yamauchi, Y., Higo, A., Kakushima, K., Fujita, H., & Toshiyoshi, H. (2005). A light-in light-out micro mirror device. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 1175-1178). [3A2.4] (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 2). https://doi.org/10.1109/SENSOR.2005.1497287

A light-in light-out micro mirror device. / Yamauchi, Yuko; Higo, Akio; Kakushima, Kuniyuki et al.
TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 1175-1178 3A2.4 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yamauchi, Y, Higo, A, Kakushima, K, Fujita, H & Toshiyoshi, H 2005, A light-in light-out micro mirror device. in TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers., 3A2.4, Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05, vol. 2, pp. 1175-1178, 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, Seoul, Korea, Republic of, 05/6/5. https://doi.org/10.1109/SENSOR.2005.1497287

Yamauchi Y, Higo A, Kakushima K, Fujita H, Toshiyoshi H. A light-in light-out micro mirror device. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 1175-1178. 3A2.4. (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05). doi: 10.1109/SENSOR.2005.1497287

Yamauchi, Yuko ; Higo, Akio ; Kakushima, Kuniyuki et al. / A light-in light-out micro mirror device. TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. pp. 1175-1178 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05).

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abstract = "In this paper, we report a new concept of optical MEMS (Micro Electro Mechanical System) devices that could be operated by the incident light and to operate yet another light beam; in other words, a light beam is controlled by another light beam through an optical MEMS mirror. A photodiode and an electrostatic micro mirror are integrated into an SOI (silicon-on-insulator) wafer, whose circuit diagram is equivalent to that of a photocoupler. The mechanism can be used for free-space optical computing and optically-addressed fiber optic crossconnect.",

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author = "Yuko Yamauchi and Akio Higo and Kuniyuki Kakushima and Hiroyuki Fujita and Hiroshi Toshiyoshi",

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AU - Fujita, Hiroyuki

AU - Toshiyoshi, Hiroshi

PY - 2005

Y1 - 2005

N2 - In this paper, we report a new concept of optical MEMS (Micro Electro Mechanical System) devices that could be operated by the incident light and to operate yet another light beam; in other words, a light beam is controlled by another light beam through an optical MEMS mirror. A photodiode and an electrostatic micro mirror are integrated into an SOI (silicon-on-insulator) wafer, whose circuit diagram is equivalent to that of a photocoupler. The mechanism can be used for free-space optical computing and optically-addressed fiber optic crossconnect.

AB - In this paper, we report a new concept of optical MEMS (Micro Electro Mechanical System) devices that could be operated by the incident light and to operate yet another light beam; in other words, a light beam is controlled by another light beam through an optical MEMS mirror. A photodiode and an electrostatic micro mirror are integrated into an SOI (silicon-on-insulator) wafer, whose circuit diagram is equivalent to that of a photocoupler. The mechanism can be used for free-space optical computing and optically-addressed fiber optic crossconnect.

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KW - Photodiode

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A light-in light-out micro mirror device

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Keywords

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