Abstract
In this paper, a linear micro-stage with a long stroke was presented based on the principle of impact friction drive for precision positioning of micro-objects. By employing small and strong magnets as friction elements, the influence of changes in frictional force due to wear of friction elements can be reduced, which improves the stability of the stage. A prototype stage was designed and constructed, and experiments were carried out to test the basic performance of the stage. It has been verified that, with a compact size of 20 mm × 10 mm × 3 mm, the stage can achieve a resolution of 6 nm, a maximum driving speed of 5.4 mm/s, and a total displacement of 20 mm.
| Original language | English |
|---|---|
| Pages (from-to) | 221-227 |
| Number of pages | 7 |
| Journal | Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering |
| Volume | 9 |
| Issue number | 3 |
| Publication status | Published - 2011 May |
Keywords
- Impact friction drive
- Linear micro-stage
- Long stroke
- Magnet
- Piezoelectric element(PZT)
- Precision positioning
ASJC Scopus subject areas
- Instrumentation
- Mechanical Engineering
- Industrial and Manufacturing Engineering