A linear-rotary stage for precision positioning

Wei Gao, Shinji Sato, Yoshikazu Arai

Research output: Contribution to journalArticlepeer-review

42 Citations (Scopus)


This paper presents a linear-rotary (Z-θZ) stage that can generate motions along and about the Z-axis based on friction drive. The moving element, which is a steel cylinder, is supported and actuated by two driving units, each consisting of two PZTs and a friction component made by permanent magnet. The magnetic force is employed for holding the moving element and stabilizing the driving condition. The moving ranges and maximum speeds of the stage are 12 mm, 16 mm/s in the Z-direction and 360°, 10.5 rpm in the θZ-direction, respectively. A Z-θZ sensor is also constructed for servo control of the stage.

Original languageEnglish
Pages (from-to)301-306
Number of pages6
JournalPrecision Engineering
Issue number2
Publication statusPublished - 2010 Apr


  • Actuator
  • Linear
  • Measurement
  • Positioning
  • Rotary
  • Sensor


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