A linear-rotary stage for precision positioning

Wei Gao; Shinji Sato; Yoshikazu Arai

doi:10.1016/j.precisioneng.2009.07.003

A linear-rotary stage for precision positioning

Wei Gao, Shinji Sato, Yoshikazu Arai

ENG - Finemechanics

Tohoku University

Research output: Contribution to journal › Article › peer-review

42 Citations (Scopus)

Abstract

This paper presents a linear-rotary (Z-θ_Z) stage that can generate motions along and about the Z-axis based on friction drive. The moving element, which is a steel cylinder, is supported and actuated by two driving units, each consisting of two PZTs and a friction component made by permanent magnet. The magnetic force is employed for holding the moving element and stabilizing the driving condition. The moving ranges and maximum speeds of the stage are 12 mm, 16 mm/s in the Z-direction and 360°, 10.5 rpm in the θ_Z-direction, respectively. A Z-θ_Z sensor is also constructed for servo control of the stage.

Original language	English
Pages (from-to)	301-306
Number of pages	6
Journal	Precision Engineering
Volume	34
Issue number	2
DOIs	https://doi.org/10.1016/j.precisioneng.2009.07.003
Publication status	Published - 2010 Apr

Keywords

Actuator
Linear
Measurement
Positioning
Rotary
Sensor

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10.1016/j.precisioneng.2009.07.003

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title = "A linear-rotary stage for precision positioning",

abstract = "This paper presents a linear-rotary (Z-θZ) stage that can generate motions along and about the Z-axis based on friction drive. The moving element, which is a steel cylinder, is supported and actuated by two driving units, each consisting of two PZTs and a friction component made by permanent magnet. The magnetic force is employed for holding the moving element and stabilizing the driving condition. The moving ranges and maximum speeds of the stage are 12 mm, 16 mm/s in the Z-direction and 360°, 10.5 rpm in the θZ-direction, respectively. A Z-θZ sensor is also constructed for servo control of the stage.",

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AU - Gao, Wei

AU - Sato, Shinji

AU - Arai, Yoshikazu

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N2 - This paper presents a linear-rotary (Z-θZ) stage that can generate motions along and about the Z-axis based on friction drive. The moving element, which is a steel cylinder, is supported and actuated by two driving units, each consisting of two PZTs and a friction component made by permanent magnet. The magnetic force is employed for holding the moving element and stabilizing the driving condition. The moving ranges and maximum speeds of the stage are 12 mm, 16 mm/s in the Z-direction and 360°, 10.5 rpm in the θZ-direction, respectively. A Z-θZ sensor is also constructed for servo control of the stage.

AB - This paper presents a linear-rotary (Z-θZ) stage that can generate motions along and about the Z-axis based on friction drive. The moving element, which is a steel cylinder, is supported and actuated by two driving units, each consisting of two PZTs and a friction component made by permanent magnet. The magnetic force is employed for holding the moving element and stabilizing the driving condition. The moving ranges and maximum speeds of the stage are 12 mm, 16 mm/s in the Z-direction and 360°, 10.5 rpm in the θZ-direction, respectively. A Z-θZ sensor is also constructed for servo control of the stage.

KW - Actuator

KW - Linear

KW - Measurement

KW - Positioning

KW - Rotary

KW - Sensor

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JO - Precision Engineering

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A linear-rotary stage for precision positioning

Abstract

Keywords

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