@inproceedings{8051f86212af41fcb9af884f5a1b97cc,
title = "A MEMS slip sensor: Estimations of triaxial force and coefficient of static friction for prediction of a slip",
abstract = "We report on a MEMS slip sensor that estimates triaxial force as well as coefficient of static friction for prediction of a slip. The sensor was composed of the outer and inner elastomers separated by a hard substrate, which enable to measure triaxial force independently of coefficient of static friction. We fabricated a prototype of the sensor and evaluated it by pressing and sliding it on various conditions of coefficient of static friction.",
keywords = "Coefficient of static friction, Piezoresistive, Slip sensor, Tactile, Triaxial force",
author = "Taiyu Okatani and Akihito Nakai and Tomoyuki Takahata and Isao Shimoyama",
note = "Funding Information: The photolithography masks were made using the University of Tokyo VLSI Design and Education Center (VDEC){\textquoteright}s 8 inch EB writer F5112 + VD01 donated by ADVANTEST Corporation. This work was partly supported by JSPS KAKENHI Grant Number 25000010. Publisher Copyright: {\textcopyright} 2017 IEEE.; 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 ; Conference date: 18-06-2017 Through 22-06-2017",
year = "2017",
month = jul,
day = "26",
doi = "10.1109/TRANSDUCERS.2017.7993991",
language = "English",
series = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "75--77",
booktitle = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",
address = "United States",
}