A method for 3D shape reconstruction from SEM images

Kosuke Kamada; Koichiro Deguchi; Takayuki Okatani

A method for 3D shape reconstruction from SEM images

Kosuke Kamada, Koichiro Deguchi, Takayuki Okatani

INF - System Information Sciences

Tohoku University

Research output: Contribution to conference › Paper › peer-review

Abstract

In this paper, we present an extension of a method for reconstructing the shape of an object surface from its SEM image. Most of previous researches used real SEM images of an object whose shape is not known, correctness of thier results were not examined. We examined the method using a real SEM image of a known shape. We show problems which occur when the method is applied to real SEM images.

Original language	English
Pages	650-653
Number of pages	4
Publication status	Published - 2005
Event	SICE Annual Conference 2005 - Okayama, Japan Duration: 2005 Aug 8 → 2005 Aug 10

Conference

Conference	SICE Annual Conference 2005
Country/Territory	Japan
City	Okayama
Period	05/8/8 → 05/8/10

Keywords

3D reconstruction
Reflectance model
SEM image

Cite this

@conference{7390c18deefa41dc9a53b4a4ffd686ce,

title = "A method for 3D shape reconstruction from SEM images",

abstract = "In this paper, we present an extension of a method for reconstructing the shape of an object surface from its SEM image. Most of previous researches used real SEM images of an object whose shape is not known, correctness of thier results were not examined. We examined the method using a real SEM image of a known shape. We show problems which occur when the method is applied to real SEM images.",

keywords = "3D reconstruction, Reflectance model, SEM image",

author = "Kosuke Kamada and Koichiro Deguchi and Takayuki Okatani",

year = "2005",

language = "English",

pages = "650--653",

note = "SICE Annual Conference 2005 ; Conference date: 08-08-2005 Through 10-08-2005",

}

TY - CONF

T1 - A method for 3D shape reconstruction from SEM images

AU - Kamada, Kosuke

AU - Deguchi, Koichiro

AU - Okatani, Takayuki

PY - 2005

Y1 - 2005

N2 - In this paper, we present an extension of a method for reconstructing the shape of an object surface from its SEM image. Most of previous researches used real SEM images of an object whose shape is not known, correctness of thier results were not examined. We examined the method using a real SEM image of a known shape. We show problems which occur when the method is applied to real SEM images.

AB - In this paper, we present an extension of a method for reconstructing the shape of an object surface from its SEM image. Most of previous researches used real SEM images of an object whose shape is not known, correctness of thier results were not examined. We examined the method using a real SEM image of a known shape. We show problems which occur when the method is applied to real SEM images.

KW - 3D reconstruction

KW - Reflectance model

KW - SEM image

UR - http://www.scopus.com/inward/record.url?scp=33645304608&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33645304608&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:33645304608

SP - 650

EP - 653

T2 - SICE Annual Conference 2005

Y2 - 8 August 2005 through 10 August 2005

ER -

A method for 3D shape reconstruction from SEM images

Abstract

Conference

Keywords

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Cite this