TY - JOUR
T1 - A micro-ball tapping probe for form measurement of micro-structured surface
AU - Xu, Bin
AU - Shimizu, Yuki
AU - Ito, So
AU - Gao, Wei
PY - 2013/2
Y1 - 2013/2
N2 - A micro-ball tapping probe is proposed for the form measurement of the micro-structured surface with high-aspect-ratio features. The micro-ball tapping probe is composed of a micro-ball stylus, a PZT actuator and an adapter. The micro-ball stylus consists of a micro-ball with a diameter of 50 μm, and a glass tube with a cone angle of 10 degrees. The micro-ball tapping probe was employed by a contact type air-bearing displacement sensor. Series of experiments were carried out to confirm the feasibility and performance of the proposed micro-ball tapping probe, including the strength test, the frequency characteristic test, the measurement force test and the surface form measurement for a micro-structured surface. Experimental results revealed that the micro-ball tapping probe is suitable for the form measurement of the micro-structured surface with high-aspect-ratio features.
AB - A micro-ball tapping probe is proposed for the form measurement of the micro-structured surface with high-aspect-ratio features. The micro-ball tapping probe is composed of a micro-ball stylus, a PZT actuator and an adapter. The micro-ball stylus consists of a micro-ball with a diameter of 50 μm, and a glass tube with a cone angle of 10 degrees. The micro-ball tapping probe was employed by a contact type air-bearing displacement sensor. Series of experiments were carried out to confirm the feasibility and performance of the proposed micro-ball tapping probe, including the strength test, the frequency characteristic test, the measurement force test and the surface form measurement for a micro-structured surface. Experimental results revealed that the micro-ball tapping probe is suitable for the form measurement of the micro-structured surface with high-aspect-ratio features.
KW - Air-bearing displacement sensor
KW - High-aspect-ratio
KW - Micro-ball stylus
KW - Micro-structure
KW - Micro-tapping probe
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M3 - Article
AN - SCOPUS:84887715142
SN - 0257-9731
VL - 34
SP - 73
EP - 80
JO - Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao
JF - Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao
IS - 1
ER -