A Micromachined Ionic Liquid Ion Source with Flow-Controlled Segmented Annular Channels

Nguyen Van Chinh; Le Van Minh; Takahito Ono; Hiroki Kuwano

doi:10.1109/TRANSDUCERS.2019.8808471

A Micromachined Ionic Liquid Ion Source with Flow-Controlled Segmented Annular Channels

Nguyen Van Chinh, Le Van Minh, Takahito Ono, Hiroki Kuwano

Tohoku University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

Abstract

In this work, we present a micromachined fluorine-based ion source (IS) for nano-/micro-processing applications. Our proposed structure is composed of an out-of-plane Si micro-emitter surrounded by four segmented annular micro-channels. The segmented channels were implemented to control the ionic liquid (IL) flow supplied to the tip emitter, enabling to broaden the working regime and overcome the droplet emission which was observed in the conventional ionic liquid ion source (ILIS). The 1-ethyl-3-methylimidazolium tetrafluoroborate (EMIM-BF₄) IL was used to produce reactive fluorine-based ions. The ILIS enabled to emit the fluorine-based ions without droplets for a wide range of voltage supply from 2.8 kV to 5 kV. The ion source was demonstrated for patterning a Si structure with the maximum etching rate of 150 μm³.μA^-1.min^-1.

Original language	English
Title of host publication	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1674-1677
Number of pages	4
ISBN (Electronic)	9781728120072
DOIs	https://doi.org/10.1109/TRANSDUCERS.2019.8808471
Publication status	Published - 2019 Jun
Event	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany Duration: 2019 Jun 23 → 2019 Jun 27

Publication series

Name	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Country/Territory	Germany
City	Berlin
Period	19/6/23 → 19/6/27

Keywords

focused ion beam
Ionic liquid
ionic liquid ion source
MEMS
micro ion source

Access to Document

10.1109/TRANSDUCERS.2019.8808471

Cite this

Chinh, N. V., Minh, L. V., Ono, T., & Kuwano, H. (2019). A Micromachined Ionic Liquid Ion Source with Flow-Controlled Segmented Annular Channels. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 1674-1677). Article 8808471 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2019.8808471

Chinh, Nguyen Van ; Minh, Le Van ; Ono, Takahito et al. / A Micromachined Ionic Liquid Ion Source with Flow-Controlled Segmented Annular Channels. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 1674-1677 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

@inproceedings{fd10ae90db1d4215a132290c32d7fe8b,

title = "A Micromachined Ionic Liquid Ion Source with Flow-Controlled Segmented Annular Channels",

abstract = "In this work, we present a micromachined fluorine-based ion source (IS) for nano-/micro-processing applications. Our proposed structure is composed of an out-of-plane Si micro-emitter surrounded by four segmented annular micro-channels. The segmented channels were implemented to control the ionic liquid (IL) flow supplied to the tip emitter, enabling to broaden the working regime and overcome the droplet emission which was observed in the conventional ionic liquid ion source (ILIS). The 1-ethyl-3-methylimidazolium tetrafluoroborate (EMIM-BF4) IL was used to produce reactive fluorine-based ions. The ILIS enabled to emit the fluorine-based ions without droplets for a wide range of voltage supply from 2.8 kV to 5 kV. The ion source was demonstrated for patterning a Si structure with the maximum etching rate of 150 μm3.μA-1.min-1.",

keywords = "focused ion beam, Ionic liquid, ionic liquid ion source, MEMS, micro ion source",

author = "Chinh, {Nguyen Van} and Minh, {Le Van} and Takahito Ono and Hiroki Kuwano",

note = "Funding Information: the Ministry of Education, Culture, Sports, Science and Technology (MEXT) (Grant. No. 16H0293). Publisher Copyright: {\textcopyright} 2019 IEEE.; 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII ; Conference date: 23-06-2019 Through 27-06-2019",

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publisher = "Institute of Electrical and Electronics Engineers Inc.",

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Chinh, NV, Minh, LV , Ono, T & Kuwano, H 2019, A Micromachined Ionic Liquid Ion Source with Flow-Controlled Segmented Annular Channels. in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII., 8808471, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Institute of Electrical and Electronics Engineers Inc., pp. 1674-1677, 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Berlin, Germany, 19/6/23. https://doi.org/10.1109/TRANSDUCERS.2019.8808471

A Micromachined Ionic Liquid Ion Source with Flow-Controlled Segmented Annular Channels. / Chinh, Nguyen Van; Minh, Le Van ; Ono, Takahito et al.
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. p. 1674-1677 8808471 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

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AU - Chinh, Nguyen Van

AU - Minh, Le Van

AU - Ono, Takahito

AU - Kuwano, Hiroki

PY - 2019/6

Y1 - 2019/6

N2 - In this work, we present a micromachined fluorine-based ion source (IS) for nano-/micro-processing applications. Our proposed structure is composed of an out-of-plane Si micro-emitter surrounded by four segmented annular micro-channels. The segmented channels were implemented to control the ionic liquid (IL) flow supplied to the tip emitter, enabling to broaden the working regime and overcome the droplet emission which was observed in the conventional ionic liquid ion source (ILIS). The 1-ethyl-3-methylimidazolium tetrafluoroborate (EMIM-BF4) IL was used to produce reactive fluorine-based ions. The ILIS enabled to emit the fluorine-based ions without droplets for a wide range of voltage supply from 2.8 kV to 5 kV. The ion source was demonstrated for patterning a Si structure with the maximum etching rate of 150 μm3.μA-1.min-1.

AB - In this work, we present a micromachined fluorine-based ion source (IS) for nano-/micro-processing applications. Our proposed structure is composed of an out-of-plane Si micro-emitter surrounded by four segmented annular micro-channels. The segmented channels were implemented to control the ionic liquid (IL) flow supplied to the tip emitter, enabling to broaden the working regime and overcome the droplet emission which was observed in the conventional ionic liquid ion source (ILIS). The 1-ethyl-3-methylimidazolium tetrafluoroborate (EMIM-BF4) IL was used to produce reactive fluorine-based ions. The ILIS enabled to emit the fluorine-based ions without droplets for a wide range of voltage supply from 2.8 kV to 5 kV. The ion source was demonstrated for patterning a Si structure with the maximum etching rate of 150 μm3.μA-1.min-1.

KW - focused ion beam

KW - Ionic liquid

KW - ionic liquid ion source

KW - MEMS

KW - micro ion source

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M3 - Conference contribution

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BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

PB - Institute of Electrical and Electronics Engineers Inc.

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Chinh NV, Minh LV , Ono T, Kuwano H. A Micromachined Ionic Liquid Ion Source with Flow-Controlled Segmented Annular Channels. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc. 2019. p. 1674-1677. 8808471. (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). doi: 10.1109/TRANSDUCERS.2019.8808471

A Micromachined Ionic Liquid Ion Source with Flow-Controlled Segmented Annular Channels

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