A microwave probe nanostructure for atomic force microscopy

Y. Ju, M. Hamada, T. Kobayashi, H. Soyama

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)


An atomic force microscope (AFM) probe on a GaAs wafer was studied as a new microwave probe structure. A waveguide was created by evaporating an Au film on the top and bottom surfaces of the GaAs AFM probe. The fabricated AMF probe's tip is 8 μm long and has a radius of curvature of about 50 nm. The open structure of the waveguide at the tip of the probe was generated by using focused ion beam (FIB) fabrication. AFM topography of a grating sample was created by using the fabricated microwave AFM probe. The fabricated probe exhibits nanometer-scale resolution, and microwave emission was successfully detected at the tip of the probe by approaching Cr-V steel and Au wire samples.

Original languageEnglish
Pages (from-to)1195-1199
Number of pages5
JournalMicrosystem Technologies
Issue number8
Publication statusPublished - 2009 Aug


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