A miniaturized biconvex quartz-crystal microbalance with large-radius spherical thickness distribution

The fabrication of a miniaturized biconvex quartz-crystal microbalance (QCM) with large-radius spherical thickness distribution using reactive ion etching and photoresist reflow with solvent vapor technology was presented. It was shown that the method could not only help achieve large-radius spherical convex shape, but also in miniaturization and batch fabrication processes. It was demonstrated that the Q factor of the fabricated QCM is two times higher than that of the planar QCM, while the spurious mode around the fundamental vibration mode is also suppressed. The QCM was also found to possess superior resonant characteristics under the viscoelastic liquid.