TY - GEN
T1 - A multiple sensor platform with dedicated CMOS-LSIs for robot applications
AU - Shao, Chenzhong
AU - Nakayama, Takahiro
AU - Hata, Yoshiyuki
AU - Bartley, Travis
AU - Nonomura, Yutaka
AU - Tanaka, Shuji
AU - Muroyama, Masanori
N1 - Publisher Copyright:
© 2016 IEEE.
PY - 2016/11/28
Y1 - 2016/11/28
N2 - In recent years, there has been an increasing interest in robots' tactile sense, which enables safer, more reliable and accurate human-robot communication for the future society. So far, we have developed a capacitive type tactile sensor network system for implementing a large number of sensors with MEMS-CMOS integration technologies [1-3, 9]. Considering practical use for the robot, multiple kind sensors in addition to numerous sensor distributions are necessary in terms of accurate object recognition and wide coverage of sensor requirements such as high-sensitivity, large dynamic range, high-reliability and low-cost. Thus, we proposed a sensor platform with dedicated CMOS-LSIs [6], which can utilize three types of sensors: on-chip temperature, off-chip capacitive and resistive tactile sensors. The CMOS-LSI is well designed for integration with MEMS. This paper describes the first implementation results of the multiple kind sensors with the CMOS-LSIs. We successfully constructed the multi sensor system, which has the temperature sensor, capacitive and resistive type force sensors.
AB - In recent years, there has been an increasing interest in robots' tactile sense, which enables safer, more reliable and accurate human-robot communication for the future society. So far, we have developed a capacitive type tactile sensor network system for implementing a large number of sensors with MEMS-CMOS integration technologies [1-3, 9]. Considering practical use for the robot, multiple kind sensors in addition to numerous sensor distributions are necessary in terms of accurate object recognition and wide coverage of sensor requirements such as high-sensitivity, large dynamic range, high-reliability and low-cost. Thus, we proposed a sensor platform with dedicated CMOS-LSIs [6], which can utilize three types of sensors: on-chip temperature, off-chip capacitive and resistive tactile sensors. The CMOS-LSI is well designed for integration with MEMS. This paper describes the first implementation results of the multiple kind sensors with the CMOS-LSIs. We successfully constructed the multi sensor system, which has the temperature sensor, capacitive and resistive type force sensors.
KW - CMOS-LSI
KW - multiple sensors
KW - Robot Application
KW - sensor platform
KW - tactile sensor network system
UR - http://www.scopus.com/inward/record.url?scp=85007210902&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85007210902&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2016.7758243
DO - 10.1109/NEMS.2016.7758243
M3 - Conference contribution
AN - SCOPUS:85007210902
T3 - 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
SP - 245
EP - 250
BT - 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
Y2 - 17 April 2016 through 20 April 2016
ER -