TY - JOUR
T1 - A new grating X-ray spectrometer for 2-4 keV enabling a separate observation of In-Lβ and Sn-Lα emissions of indium tin oxide
AU - Terauchi, Masami
AU - Takahashi, Hideyuki
AU - Handa, Nobuo
AU - Murano, Takanori
AU - Koike, Masato
AU - Kawachi, Tetsuya
AU - Imazono, Takashi
AU - Hasegawa, Noboru
AU - Koeda, Masaru
AU - Nagano, Tetsuya
AU - Sasai, Hiroyuki
AU - Oue, Yuki
AU - Yonezawa, Zeno
AU - Kuramoto, Satoshi
PY - 2013/6
Y1 - 2013/6
N2 - A new multilayer-coated varied line-spaced grating, JS4000, was fabricated and tested for extending the upper limit of a grating X-ray spectrometer for electron microscopy. This grating was designed for 2-3.8 keV at a grazing incidence angle of 1.35°. It was revealed that this new multilayer structure enables us to take soft-X-ray emission spectra continuously from 1.5 to 4.3 keV at the same optical setting. The full-width at half maximum of Te-L α1,2 (3.8 keV) emission peak was 27 eV. This spectrometer was applied to indium tin oxide particles and clearly resolved Sn-L α (3444 eV) and In-Lβ1 (3487 eV) peaks, which could not be resolved by a widely used energy-dispersive X-ray spectrometer.
AB - A new multilayer-coated varied line-spaced grating, JS4000, was fabricated and tested for extending the upper limit of a grating X-ray spectrometer for electron microscopy. This grating was designed for 2-3.8 keV at a grazing incidence angle of 1.35°. It was revealed that this new multilayer structure enables us to take soft-X-ray emission spectra continuously from 1.5 to 4.3 keV at the same optical setting. The full-width at half maximum of Te-L α1,2 (3.8 keV) emission peak was 27 eV. This spectrometer was applied to indium tin oxide particles and clearly resolved Sn-L α (3444 eV) and In-Lβ1 (3487 eV) peaks, which could not be resolved by a widely used energy-dispersive X-ray spectrometer.
KW - indium tin oxide
KW - multilayer coated grating
KW - soft-X-ray emission spectroscopy
KW - wavelength-dispersive spectroscopy
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U2 - 10.1093/jmicro/dfs129
DO - 10.1093/jmicro/dfs129
M3 - Article
C2 - 23307948
AN - SCOPUS:84879171541
SN - 0022-0744
VL - 62
SP - 391
EP - 395
JO - Journal of Electron Microscopy
JF - Journal of Electron Microscopy
IS - 3
ER -