A noncontact scanning electrostatic force microscope for surface profile measurement

Wei Gao, Shigeaki Goto, Keiichiro Hosobuchi, So Ito, Yuki Shimizu

Research output: Contribution to journalArticlepeer-review

21 Citations (Scopus)


A scanning electrostatic force microscope is presented for noncontact surface profile measurement. A charged conducting probe tip is oscillated by a tuning fork quartz crystal resonator. The probe tip is scanned over the sample surface by using an XY scanner in such a way that the frequency shift of the tuning fork oscillation, which corresponds to the electrostatic force gradient, is kept constant by controlling the probe Z position with a Z scanner. A dual height method is proposed to accurately obtain the tip to sample distances through removing the influence of the electric field distribution on the sample surface.

Original languageEnglish
Pages (from-to)471-474
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Issue number1
Publication statusPublished - 2012


  • Metrology
  • Probe
  • Profile


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