TY - JOUR
T1 - A noncontact scanning electrostatic force microscope for surface profile measurement
AU - Gao, Wei
AU - Goto, Shigeaki
AU - Hosobuchi, Keiichiro
AU - Ito, So
AU - Shimizu, Yuki
PY - 2012
Y1 - 2012
N2 - A scanning electrostatic force microscope is presented for noncontact surface profile measurement. A charged conducting probe tip is oscillated by a tuning fork quartz crystal resonator. The probe tip is scanned over the sample surface by using an XY scanner in such a way that the frequency shift of the tuning fork oscillation, which corresponds to the electrostatic force gradient, is kept constant by controlling the probe Z position with a Z scanner. A dual height method is proposed to accurately obtain the tip to sample distances through removing the influence of the electric field distribution on the sample surface.
AB - A scanning electrostatic force microscope is presented for noncontact surface profile measurement. A charged conducting probe tip is oscillated by a tuning fork quartz crystal resonator. The probe tip is scanned over the sample surface by using an XY scanner in such a way that the frequency shift of the tuning fork oscillation, which corresponds to the electrostatic force gradient, is kept constant by controlling the probe Z position with a Z scanner. A dual height method is proposed to accurately obtain the tip to sample distances through removing the influence of the electric field distribution on the sample surface.
KW - Metrology
KW - Probe
KW - Profile
UR - http://www.scopus.com/inward/record.url?scp=84861637994&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84861637994&partnerID=8YFLogxK
U2 - 10.1016/j.cirp.2012.03.097
DO - 10.1016/j.cirp.2012.03.097
M3 - Article
AN - SCOPUS:84861637994
SN - 0007-8506
VL - 61
SP - 471
EP - 474
JO - CIRP Annals - Manufacturing Technology
JF - CIRP Annals - Manufacturing Technology
IS - 1
ER -