Abstract
A novel actuation mechanism is presented, which makes use of the antagonism of intrinsic magnetic and shape recovery forces acting on a ferromagnetic shape memory alloy (SMA) microactuator in a magnetic field. This mechanism is associated with large actuation and small biasing forces in each actuation direction resulting in a large stroke. Since no additional biasing elements are required, extremely compact designs are possible. As a demonstrator, an optical microscanner of 7mm×3mm×5mm size is presented showing large scanning angles up to 120° in off-resonance mode. The scanning performance keeps frequency independent below a critical frequency, which is determined by heat transfer times.
| Original language | English |
|---|---|
| Pages (from-to) | 445-450 |
| Number of pages | 6 |
| Journal | Sensors and Actuators, A: Physical |
| Volume | 114 |
| Issue number | 2-3 |
| DOIs | |
| Publication status | Published - 2004 Sept 1 |
| Event | Selected Papers from Transducers 03 - Boston, MA, United States Duration: 2003 Jun 8 → 2003 Jun 12 |
Keywords
- Microscanner
- NiMnGa thin films
- Shape memory actuator
- Smart materials
- Sputter deposition
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering