A novel actuation mechanism on the basis of ferromagnetic SMA thin films

M. Kohl, D. Brugger, M. Ohtsuka, T. Takagi

Research output: Contribution to journalConference articlepeer-review

100 Citations (Scopus)


A novel actuation mechanism is presented, which makes use of the antagonism of intrinsic magnetic and shape recovery forces acting on a ferromagnetic shape memory alloy (SMA) microactuator in a magnetic field. This mechanism is associated with large actuation and small biasing forces in each actuation direction resulting in a large stroke. Since no additional biasing elements are required, extremely compact designs are possible. As a demonstrator, an optical microscanner of 7mm×3mm×5mm size is presented showing large scanning angles up to 120° in off-resonance mode. The scanning performance keeps frequency independent below a critical frequency, which is determined by heat transfer times.

Original languageEnglish
Pages (from-to)445-450
Number of pages6
JournalSensors and Actuators, A: Physical
Issue number2-3
Publication statusPublished - 2004 Sept 1
EventSelected Papers from Transducers 03 - Boston, MA, United States
Duration: 2003 Jun 82003 Jun 12


  • Microscanner
  • NiMnGa thin films
  • Shape memory actuator
  • Smart materials
  • Sputter deposition

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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