A novel control method using nonlinear observer for a XYθz planar actuator

Y. Arai; S. Y. Dian; W. Gao

A novel control method using nonlinear observer for a XYθ_z planar actuator

Y. Arai, S. Y. Dian, W. Gao

ENG - Finemechanics

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

In this study, a novel control law including a fine-tuned PID component to yield basic dynamic performance, and a component derived from the Sliding Mode Observer (SMO) to estimate and then compensate for modeling uncertainties and disturbances, has been introduced to planar actuator of an ultra-precision positioning stage. Experimental results are presented to verify the effectiveness of suggested dynamic compensation strategy and tracking performance of the non-contact planar actuator.

Original language	English
Pages (from-to)	195-198
Number of pages	4
Journal	Key Engineering Materials
Volume	381-382
Publication status	Published - 2008 Jan 1

Keywords

Actuator
Disturbance
Modeling uncertainties
Sliding mode observer(SMO)
Ultra-precision positioning

ASJC Scopus subject areas

Materials Science(all)
Mechanics of Materials
Mechanical Engineering

Cite this

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abstract = "In this study, a novel control law including a fine-tuned PID component to yield basic dynamic performance, and a component derived from the Sliding Mode Observer (SMO) to estimate and then compensate for modeling uncertainties and disturbances, has been introduced to planar actuator of an ultra-precision positioning stage. Experimental results are presented to verify the effectiveness of suggested dynamic compensation strategy and tracking performance of the non-contact planar actuator.",

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N2 - In this study, a novel control law including a fine-tuned PID component to yield basic dynamic performance, and a component derived from the Sliding Mode Observer (SMO) to estimate and then compensate for modeling uncertainties and disturbances, has been introduced to planar actuator of an ultra-precision positioning stage. Experimental results are presented to verify the effectiveness of suggested dynamic compensation strategy and tracking performance of the non-contact planar actuator.

AB - In this study, a novel control law including a fine-tuned PID component to yield basic dynamic performance, and a component derived from the Sliding Mode Observer (SMO) to estimate and then compensate for modeling uncertainties and disturbances, has been introduced to planar actuator of an ultra-precision positioning stage. Experimental results are presented to verify the effectiveness of suggested dynamic compensation strategy and tracking performance of the non-contact planar actuator.

KW - Actuator

KW - Disturbance

KW - Modeling uncertainties

KW - Sliding mode observer(SMO)

KW - Ultra-precision positioning

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ER -

A novel control method using nonlinear observer for a XYθ_z planar actuator

Abstract

Keywords

ASJC Scopus subject areas

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