A Novel Quality Factor Trimming Method for Multi-Ring MEMS Resonators Based on Thermoelastic Dissipation

Hamza Abdelli, Takashiro Tsukamoto, Muhammad Khan, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Citations (Scopus)

Abstract

We report, for the first time, the experimental demonstration of quality factor (Q-factor) trimming based on thermoelastic dissipation (TED). The proposed method could control the heat path, eventually energy dissipation rate by TED. By the appropriate choice of the trimming location, it could tune the Q-factor of a mode, almost independent from the Q-factors of other modes as well as the resonant frequencies. A multiring resonator was designed and evaluated to demonstrate the Q-factor tuning of a n = 2 wine glass mode. The Q-factor difference could be trimmed as high as 19.43%, while the frequency difference changed was as small as 0.43%.

Original languageEnglish
Title of host publication35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages766-769
Number of pages4
ISBN (Electronic)9781665409117
DOIs
Publication statusPublished - 2022
Event35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan
Duration: 2022 Jan 92022 Jan 13

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2022-January
ISSN (Print)1084-6999

Conference

Conference35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Country/TerritoryJapan
CityTokyo
Period22/1/922/1/13

Keywords

  • FM gyroscope
  • Focused ion beam
  • Multi-ring resonator
  • Q-factor trimming
  • Rate integrating gyroscope
  • TED

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