TY - GEN
T1 - A novel scanning tunneling microscopy for long range and high aspect ratio measurement
AU - Chen, Yuan Liu
AU - Ju, Bing Feng
PY - 2010/12/1
Y1 - 2010/12/1
N2 - To improve the metrological characteristics of the measurement technique scanning probe microscopy by broadening its measuring range as well as increasing its high aspect ratio measuring capability, a new STM has been developed. A dual-stage servo instead of 3D PZT tube scanner is arranged such that for features within the range of the fast actuator, both long range and high speed. The raster scanning is achieved by two linear stages that driven by servo-motors. Each of the stage has a travel stroke of 25 mm, a maximum speed of 1.5 mm/s and a minimum incremental motion of 10 nm. A PZT actuator mounted onto the raster scanning stage serves as fast feedback servo for operation on constant current mode. Also in order to enable the STM to measure high aspect ratio micro structures, STM probe with high aspect ratio up to 450:1 has been developed and integrated into the new STM. Using this new STM system, a long range of 500 μm line scanning and a 300 μm× 300 μm 3D surface scanning has been successfully achieved. A trench with a depth of 2.8 μm has also been faithfully measured.
AB - To improve the metrological characteristics of the measurement technique scanning probe microscopy by broadening its measuring range as well as increasing its high aspect ratio measuring capability, a new STM has been developed. A dual-stage servo instead of 3D PZT tube scanner is arranged such that for features within the range of the fast actuator, both long range and high speed. The raster scanning is achieved by two linear stages that driven by servo-motors. Each of the stage has a travel stroke of 25 mm, a maximum speed of 1.5 mm/s and a minimum incremental motion of 10 nm. A PZT actuator mounted onto the raster scanning stage serves as fast feedback servo for operation on constant current mode. Also in order to enable the STM to measure high aspect ratio micro structures, STM probe with high aspect ratio up to 450:1 has been developed and integrated into the new STM. Using this new STM system, a long range of 500 μm line scanning and a 300 μm× 300 μm 3D surface scanning has been successfully achieved. A trench with a depth of 2.8 μm has also been faithfully measured.
KW - High aspect ratio
KW - Long range
KW - Scanning tunneling microscopy
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M3 - Conference contribution
AN - SCOPUS:84871538576
SN - 9781617820199
T3 - 10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010
SP - 362
EP - 365
BT - 10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010
T2 - 10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010
Y2 - 5 September 2010 through 9 September 2010
ER -