TY - GEN
T1 - A semiconductor-based field-effect platform for (Bio-)chemical and physical sensors
T2 - 2006 MRS Fall Meeting
AU - Schöning, Michael J.
AU - Abouzar, Maryam H.
AU - Wagner, Torsten
AU - Näther, Niko
AU - Rolka, David
AU - Yoshinobu, Tatsuo
AU - Kloock, Joachim P.
AU - Turek, Monika
AU - Ingebrandt, Sven
AU - Poghossian, Arshak
PY - 2006
Y1 - 2006
N2 - The coupling of semiconductor field-effect devices (FED) together with chemical and biological recognition elements, like functional intelligent materials, biomolecules and living cells, represents an attractive platform for the creation of different (bio-)chemical sensors, multiparameter analysis systems and bio-chips. This paper summarises recent developments and current research activities in the field of (bio-)chemically modified FEDs, scaling down from capacitive EIS (electrolyte-insulator-semiconductor) sensors and LAPS (light-addressable Potentiometrie sensor) to ISFETs (ion-sensitive field-effect transistor) that have been realised in our laboratory. Selected examples of application of ISFETs for the detection of physical parameters in liquids are presented, too. With the aim of future development of nano-devices for the detection of single biomolecules, the possibility of a simple preparation of different selfaligned nano-structures by using conventional photolithography and pattern-size reduction technique has been experimentally demonstrated.
AB - The coupling of semiconductor field-effect devices (FED) together with chemical and biological recognition elements, like functional intelligent materials, biomolecules and living cells, represents an attractive platform for the creation of different (bio-)chemical sensors, multiparameter analysis systems and bio-chips. This paper summarises recent developments and current research activities in the field of (bio-)chemically modified FEDs, scaling down from capacitive EIS (electrolyte-insulator-semiconductor) sensors and LAPS (light-addressable Potentiometrie sensor) to ISFETs (ion-sensitive field-effect transistor) that have been realised in our laboratory. Selected examples of application of ISFETs for the detection of physical parameters in liquids are presented, too. With the aim of future development of nano-devices for the detection of single biomolecules, the possibility of a simple preparation of different selfaligned nano-structures by using conventional photolithography and pattern-size reduction technique has been experimentally demonstrated.
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U2 - 10.1557/proc-0952-f08-02
DO - 10.1557/proc-0952-f08-02
M3 - Conference contribution
AN - SCOPUS:40949113293
SN - 9781604234084
T3 - Materials Research Society Symposium Proceedings
SP - 7
EP - 15
BT - Integrated Nanosensors
PB - Materials Research Society
Y2 - 27 November 2006 through 1 December 2006
ER -