@inproceedings{92dbbe2662ad4da5b49c2f6e5769318b,
title = "A Silicon Photonic MEMS Matrix Switch Using Directional Couplers in Comparison with that Using Adiabatic Couplers",
abstract = "Silicon photonic waveguide matrix switch using ultra-small electrostatic actuators attracts attentions. In this report, a small matrix switch using directional couplers is designed, fabricated and tested. Since the directional coupler (10μm) is shorter than our previous adiabatic coupler (50μm), the size of matrix switch can be decreased. At a coupler gap of 88nm, the port isolation of single switch cell was 12 dB. The switching time was 16 μsec. A 4 × 4 matrix switch was also fabricated and tested.",
keywords = "Optical switch, comb actuator, coupler, silicon waveguide",
author = "Takumi Nagai and Kazuhiro Hane",
note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII ; Conference date: 23-06-2019 Through 27-06-2019",
year = "2019",
month = jun,
doi = "10.1109/TRANSDUCERS.2019.8808766",
language = "English",
series = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1533--1536",
booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",
address = "United States",
}