TY - GEN
T1 - A spiral scanning-type AFM for high-speed and large-area measurement
AU - Cui, Yuguo
AU - He, Gaofa
AU - Arai, Yoshikazu
AU - Asai, Takemi
AU - Gao, Wei
PY - 2008
Y1 - 2008
N2 - This paper presents a spiral scanning-type AFM for high-speed and large-area measurement. The AFM is composed of an air-bearing linear stage and an air-bearing spindle for fast XY scanning. An AFM probe-unit for the Z-direction measurement is mounted on the linear stage. The spiral XY scanning is conducted by synchronizing the motions of the linear stage and the spindle. The mechanical bandwidth of the Zdirectional AFM probe-unit in constant height mode is confirmed to be over 40 kHz. It takes approximately 40 seconds for measurement of an area with a diameter of 4 mm. Influence of the bandwidth of the electronics of the AFM cantilever sensor on the measurement speed is investigated.
AB - This paper presents a spiral scanning-type AFM for high-speed and large-area measurement. The AFM is composed of an air-bearing linear stage and an air-bearing spindle for fast XY scanning. An AFM probe-unit for the Z-direction measurement is mounted on the linear stage. The spiral XY scanning is conducted by synchronizing the motions of the linear stage and the spindle. The mechanical bandwidth of the Zdirectional AFM probe-unit in constant height mode is confirmed to be over 40 kHz. It takes approximately 40 seconds for measurement of an area with a diameter of 4 mm. Influence of the bandwidth of the electronics of the AFM cantilever sensor on the measurement speed is investigated.
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M3 - Conference contribution
AN - SCOPUS:84908227027
T3 - Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
SP - 384
EP - 388
BT - Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
A2 - Van Brussel, Hendrik
A2 - Brinksmeier, E.
A2 - Spaan, H.
A2 - Burke, T.
PB - euspen
T2 - 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
Y2 - 18 May 2008 through 22 May 2008
ER -