A study on cantilever-type FePd/PZT stacked-layer magnetic sensor with high sensitivity

Takashi Saito; Mio Hamashima; Chihiro Saito; Motoichi Nakamura; Teiko Okazaki; Yasubumi Furuya; Hideo Muro

doi:10.1541/ieejsmas.132.183

A study on cantilever-type FePd/PZT stacked-layer magnetic sensor with high sensitivity

Takashi Saito, Mio Hamashima, Chihiro Saito, Motoichi Nakamura, Teiko Okazaki, Yasubumi Furuya, Hideo Muro

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

The FePd/PZT/FePd and the FePd/PZT stacked-layer magnetic sensors were studied. A magnetic field was applied to the longitudinal direction of the sensor to cause a longitudinal stress magnetostrictively, which produces a piezoelectric output voltage in the PZT layer. The prototype sensors are 15 mm long and 6 mm wide and the thicknesses of the FePd layer and PZT layer are 10 μm and 330 μm, respectively. The theoretical sensitivities of the FePd/PZT/FePd sensor and the FePd/PZT sensor using a simple cantilever model were calculated to be 0.29 mV/A/m and 0.15 mV/A/m, respectively. The measured sensitivities agreed reasonably with the calculated ones.

Original language	English
Pages (from-to)	183-188
Number of pages	6
Journal	IEEJ Transactions on Sensors and Micromachines
Volume	132
Issue number	7
DOIs	https://doi.org/10.1541/ieejsmas.132.183
Publication status	Published - 2012
Externally published	Yes

Keywords

Magnetostrictive
Piezoelectric
Stacked layer
magnetic sensor

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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10.1541/ieejsmas.132.183

Cite this

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title = "A study on cantilever-type FePd/PZT stacked-layer magnetic sensor with high sensitivity",

abstract = "The FePd/PZT/FePd and the FePd/PZT stacked-layer magnetic sensors were studied. A magnetic field was applied to the longitudinal direction of the sensor to cause a longitudinal stress magnetostrictively, which produces a piezoelectric output voltage in the PZT layer. The prototype sensors are 15 mm long and 6 mm wide and the thicknesses of the FePd layer and PZT layer are 10 μm and 330 μm, respectively. The theoretical sensitivities of the FePd/PZT/FePd sensor and the FePd/PZT sensor using a simple cantilever model were calculated to be 0.29 mV/A/m and 0.15 mV/A/m, respectively. The measured sensitivities agreed reasonably with the calculated ones.",

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author = "Takashi Saito and Mio Hamashima and Chihiro Saito and Motoichi Nakamura and Teiko Okazaki and Yasubumi Furuya and Hideo Muro",

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AU - Saito, Takashi

AU - Hamashima, Mio

AU - Saito, Chihiro

AU - Nakamura, Motoichi

AU - Okazaki, Teiko

AU - Furuya, Yasubumi

AU - Muro, Hideo

PY - 2012

Y1 - 2012

N2 - The FePd/PZT/FePd and the FePd/PZT stacked-layer magnetic sensors were studied. A magnetic field was applied to the longitudinal direction of the sensor to cause a longitudinal stress magnetostrictively, which produces a piezoelectric output voltage in the PZT layer. The prototype sensors are 15 mm long and 6 mm wide and the thicknesses of the FePd layer and PZT layer are 10 μm and 330 μm, respectively. The theoretical sensitivities of the FePd/PZT/FePd sensor and the FePd/PZT sensor using a simple cantilever model were calculated to be 0.29 mV/A/m and 0.15 mV/A/m, respectively. The measured sensitivities agreed reasonably with the calculated ones.

AB - The FePd/PZT/FePd and the FePd/PZT stacked-layer magnetic sensors were studied. A magnetic field was applied to the longitudinal direction of the sensor to cause a longitudinal stress magnetostrictively, which produces a piezoelectric output voltage in the PZT layer. The prototype sensors are 15 mm long and 6 mm wide and the thicknesses of the FePd layer and PZT layer are 10 μm and 330 μm, respectively. The theoretical sensitivities of the FePd/PZT/FePd sensor and the FePd/PZT sensor using a simple cantilever model were calculated to be 0.29 mV/A/m and 0.15 mV/A/m, respectively. The measured sensitivities agreed reasonably with the calculated ones.

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KW - Piezoelectric

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A study on cantilever-type FePd/PZT stacked-layer magnetic sensor with high sensitivity

Abstract

Keywords

ASJC Scopus subject areas

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