A three-axis autocollimator for detection of angular error motions of a precision stage

W. Gao; Y. Saito; H. Muto; Y. Arai; Y. Shimizu

doi:10.1016/j.cirp.2011.03.052

A three-axis autocollimator for detection of angular error motions of a precision stage

W. Gao, Y. Saito, H. Muto, Y. Arai, Y. Shimizu

ENG - Finemechanics

Tohoku University

Research output: Contribution to journal › Article › peer-review

92 Citations (Scopus)

Abstract

This paper presents a new autocollimator that can simultaneously detect the three-axis angular error motions (pitch, yaw, and roll errors) of a precision linear stage. A collimated laser beam from a laser diode is projected onto a grating reflector mounted on the stage. The reflected 0th-order diffracted beam is received by an autocollimation unit, which consists of a collimator objective and a quadrant photodiode, for detecting the pitch and yaw errors. The reflected 1st-order diffracted beam is received by another autocollimation unit for detecting the roll error. Experiments were carried out to evaluate the basic performance of the prototype sensor.

Original language	English
Pages (from-to)	515-518
Number of pages	4
Journal	CIRP Annals - Manufacturing Technology
Volume	60
Issue number	1
DOIs	https://doi.org/10.1016/j.cirp.2011.03.052
Publication status	Published - 2011

Keywords

Metrology
Motion
Sensor

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10.1016/j.cirp.2011.03.052

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abstract = "This paper presents a new autocollimator that can simultaneously detect the three-axis angular error motions (pitch, yaw, and roll errors) of a precision linear stage. A collimated laser beam from a laser diode is projected onto a grating reflector mounted on the stage. The reflected 0th-order diffracted beam is received by an autocollimation unit, which consists of a collimator objective and a quadrant photodiode, for detecting the pitch and yaw errors. The reflected 1st-order diffracted beam is received by another autocollimation unit for detecting the roll error. Experiments were carried out to evaluate the basic performance of the prototype sensor.",

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AU - Muto, H.

AU - Arai, Y.

AU - Shimizu, Y.

N1 - Funding Information: This research was supported by JSPS and NSK-FAM Foundation .

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N2 - This paper presents a new autocollimator that can simultaneously detect the three-axis angular error motions (pitch, yaw, and roll errors) of a precision linear stage. A collimated laser beam from a laser diode is projected onto a grating reflector mounted on the stage. The reflected 0th-order diffracted beam is received by an autocollimation unit, which consists of a collimator objective and a quadrant photodiode, for detecting the pitch and yaw errors. The reflected 1st-order diffracted beam is received by another autocollimation unit for detecting the roll error. Experiments were carried out to evaluate the basic performance of the prototype sensor.

AB - This paper presents a new autocollimator that can simultaneously detect the three-axis angular error motions (pitch, yaw, and roll errors) of a precision linear stage. A collimated laser beam from a laser diode is projected onto a grating reflector mounted on the stage. The reflected 0th-order diffracted beam is received by an autocollimation unit, which consists of a collimator objective and a quadrant photodiode, for detecting the pitch and yaw errors. The reflected 1st-order diffracted beam is received by another autocollimation unit for detecting the roll error. Experiments were carried out to evaluate the basic performance of the prototype sensor.

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KW - Motion

KW - Sensor

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A three-axis autocollimator for detection of angular error motions of a precision stage

Abstract

Keywords

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