TY - JOUR
T1 - A Three-axis Displacement Sensor with Nanometric Resolution
AU - Gao, W.
AU - Kimura, A.
PY - 2007
Y1 - 2007
N2 - Instead of plane mirrors in a conventional Michelson interferometer for measurement of Z-directional displacement, the three-axis displacement sensor described in this paper employs two sinusoidal XY-grid mirrors with identical pitches (10 μm) and amplitudes (60 nm) of X- and Y-directional sine waves as the stationary reference mirror and the moving scale mirror, respectively. The positive and negative first-order diffraction light beams from the two XY-grids superimposing with each other to generate interference signals, from which the displacements of the scale grid along the X-, Y-, and Z-axes can be simultaneously obtained. Experimental results have verified that the sensor has nanometric resolutions in all the three axes.
AB - Instead of plane mirrors in a conventional Michelson interferometer for measurement of Z-directional displacement, the three-axis displacement sensor described in this paper employs two sinusoidal XY-grid mirrors with identical pitches (10 μm) and amplitudes (60 nm) of X- and Y-directional sine waves as the stationary reference mirror and the moving scale mirror, respectively. The positive and negative first-order diffraction light beams from the two XY-grids superimposing with each other to generate interference signals, from which the displacements of the scale grid along the X-, Y-, and Z-axes can be simultaneously obtained. Experimental results have verified that the sensor has nanometric resolutions in all the three axes.
KW - Displacement
KW - Metrology
KW - Sensor
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U2 - 10.1016/j.cirp.2007.05.126
DO - 10.1016/j.cirp.2007.05.126
M3 - Article
AN - SCOPUS:34250208806
SN - 0007-8506
VL - 56
SP - 529
EP - 532
JO - CIRP Annals - Manufacturing Technology
JF - CIRP Annals - Manufacturing Technology
IS - 1
ER -