A trend mining method for yield improvement based on trend in time series

Hidetaka Tsuda; Hidehiro Shirai; Masahiro Terabe; Kazuo Hashimoto; Ayumi Shinohara

A trend mining method for yield improvement based on trend in time series

Hidetaka Tsuda, Hidehiro Shirai, Masahiro Terabe, Kazuo Hashimoto, Ayumi Shinohara

INF - System Information Sciences

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We have developed a trend mining method for yield improvement which extracts non-random trend in time series buried in huge time series data. This method efficiently extracts failure causes based on trend in time series that had been almost unable to be analyzed by conventional methods.

Original language	English
Title of host publication	2008 International Symposium on Semiconductor Manufacturing, ISSM 2008
Pages	247-250
Number of pages	4
Publication status	Published - 2008
Event	2008 17th International Symposium on Semiconductor Manufacturing, ISSM 2008 - Tokyo, Japan Duration: 2008 Oct 27 → 2008 Oct 29

Publication series

Name	IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings
ISSN (Print)	1523-553X

Conference

Conference	2008 17th International Symposium on Semiconductor Manufacturing, ISSM 2008
Country/Territory	Japan
City	Tokyo
Period	08/10/27 → 08/10/29

Cite this

@inproceedings{c7555dab82524d38b53e8101ce482833,

title = "A trend mining method for yield improvement based on trend in time series",

abstract = "We have developed a trend mining method for yield improvement which extracts non-random trend in time series buried in huge time series data. This method efficiently extracts failure causes based on trend in time series that had been almost unable to be analyzed by conventional methods.",

author = "Hidetaka Tsuda and Hidehiro Shirai and Masahiro Terabe and Kazuo Hashimoto and Ayumi Shinohara",

year = "2008",

language = "English",

isbn = "9784990413828",

series = "IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings",

pages = "247--250",

booktitle = "2008 International Symposium on Semiconductor Manufacturing, ISSM 2008",

note = "2008 17th International Symposium on Semiconductor Manufacturing, ISSM 2008 ; Conference date: 27-10-2008 Through 29-10-2008",

}

Tsuda, H, Shirai, H, Terabe, M, Hashimoto, K & Shinohara, A 2008, A trend mining method for yield improvement based on trend in time series. in 2008 International Symposium on Semiconductor Manufacturing, ISSM 2008., 5714967, IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings, pp. 247-250, 2008 17th International Symposium on Semiconductor Manufacturing, ISSM 2008, Tokyo, Japan, 08/10/27.

A trend mining method for yield improvement based on trend in time series. / Tsuda, Hidetaka; Shirai, Hidehiro; Terabe, Masahiro et al.
2008 International Symposium on Semiconductor Manufacturing, ISSM 2008. 2008. p. 247-250 5714967 (IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A trend mining method for yield improvement based on trend in time series

AU - Tsuda, Hidetaka

AU - Shirai, Hidehiro

AU - Terabe, Masahiro

AU - Hashimoto, Kazuo

AU - Shinohara, Ayumi

PY - 2008

Y1 - 2008

N2 - We have developed a trend mining method for yield improvement which extracts non-random trend in time series buried in huge time series data. This method efficiently extracts failure causes based on trend in time series that had been almost unable to be analyzed by conventional methods.

AB - We have developed a trend mining method for yield improvement which extracts non-random trend in time series buried in huge time series data. This method efficiently extracts failure causes based on trend in time series that had been almost unable to be analyzed by conventional methods.

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UR - http://www.scopus.com/inward/citedby.url?scp=79952567362&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:79952567362

SN - 9784990413828

T3 - IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

SP - 247

EP - 250

BT - 2008 International Symposium on Semiconductor Manufacturing, ISSM 2008

T2 - 2008 17th International Symposium on Semiconductor Manufacturing, ISSM 2008

Y2 - 27 October 2008 through 29 October 2008

ER -

A trend mining method for yield improvement based on trend in time series

Abstract

Publication series

Conference

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