Accurate alignment of a photonic crystal nanocavity with an embedded quantum dot based on optical microscopic photoluminescence imaging

T. Kojima; K. Kojima; T. Asano; S. Noda

doi:10.1063/1.4773882

Accurate alignment of a photonic crystal nanocavity with an embedded quantum dot based on optical microscopic photoluminescence imaging

T. Kojima, K. Kojima, T. Asano, S. Noda

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47 Citations (Scopus)

Abstract

We have developed a technique to align a two-dimensional photonic-crystal nanocavity (PCNC) with an indium arsenide/gallium arsenide self-assembled quantum dot (QD), using microscopic photoluminescence (μ-PL) spectroscopy to image a wafer with a low-density of QDs and pre-formed positioning marks. Individual QD emission wavelengths were evaluated from μ-PL spectra, and positions relative to the marks were determined. The wavelength detuning between the QD-emission peak and the PCNC resonant frequency was < 4 nm, and the alignment standard deviation was < 50 nm. The emission peaks of a single QD and a PCNC aligned by this technique showed anti-crossing, implying high accuracy.

Original language	English
Article number	011110
Journal	Applied Physics Letters
Volume	102
Issue number	1
DOIs	https://doi.org/10.1063/1.4773882
Publication status	Published - 2013 Jan 7

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.4773882

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title = "Accurate alignment of a photonic crystal nanocavity with an embedded quantum dot based on optical microscopic photoluminescence imaging",

abstract = "We have developed a technique to align a two-dimensional photonic-crystal nanocavity (PCNC) with an indium arsenide/gallium arsenide self-assembled quantum dot (QD), using microscopic photoluminescence (μ-PL) spectroscopy to image a wafer with a low-density of QDs and pre-formed positioning marks. Individual QD emission wavelengths were evaluated from μ-PL spectra, and positions relative to the marks were determined. The wavelength detuning between the QD-emission peak and the PCNC resonant frequency was < 4 nm, and the alignment standard deviation was < 50 nm. The emission peaks of a single QD and a PCNC aligned by this technique showed anti-crossing, implying high accuracy.",

author = "T. Kojima and K. Kojima and T. Asano and S. Noda",

note = "Funding Information: This work was supported by the Project for Developing Innovation Systems of the Ministry of Education, Culture, Sports, Science, and Technology (MEXT) of Japan, and by Japan Society for the Promotion of Science (JSPS) Grant-in-Aid for Scientific Research (KAKENHI) Number 20226002.",

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T1 - Accurate alignment of a photonic crystal nanocavity with an embedded quantum dot based on optical microscopic photoluminescence imaging

AU - Kojima, T.

AU - Kojima, K.

AU - Asano, T.

AU - Noda, S.

N1 - Funding Information: This work was supported by the Project for Developing Innovation Systems of the Ministry of Education, Culture, Sports, Science, and Technology (MEXT) of Japan, and by Japan Society for the Promotion of Science (JSPS) Grant-in-Aid for Scientific Research (KAKENHI) Number 20226002.

PY - 2013/1/7

Y1 - 2013/1/7

N2 - We have developed a technique to align a two-dimensional photonic-crystal nanocavity (PCNC) with an indium arsenide/gallium arsenide self-assembled quantum dot (QD), using microscopic photoluminescence (μ-PL) spectroscopy to image a wafer with a low-density of QDs and pre-formed positioning marks. Individual QD emission wavelengths were evaluated from μ-PL spectra, and positions relative to the marks were determined. The wavelength detuning between the QD-emission peak and the PCNC resonant frequency was < 4 nm, and the alignment standard deviation was < 50 nm. The emission peaks of a single QD and a PCNC aligned by this technique showed anti-crossing, implying high accuracy.

AB - We have developed a technique to align a two-dimensional photonic-crystal nanocavity (PCNC) with an indium arsenide/gallium arsenide self-assembled quantum dot (QD), using microscopic photoluminescence (μ-PL) spectroscopy to image a wafer with a low-density of QDs and pre-formed positioning marks. Individual QD emission wavelengths were evaluated from μ-PL spectra, and positions relative to the marks were determined. The wavelength detuning between the QD-emission peak and the PCNC resonant frequency was < 4 nm, and the alignment standard deviation was < 50 nm. The emission peaks of a single QD and a PCNC aligned by this technique showed anti-crossing, implying high accuracy.

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Accurate alignment of a photonic crystal nanocavity with an embedded quantum dot based on optical microscopic photoluminescence imaging

Abstract

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