TY - JOUR
T1 - Accurate velocity measurement of periodic striae of TiO2- SiO2 glasses by the line-focus-beam ultrasonic material- characterization system
AU - Arakawa, Mototaka
AU - Kushibiki, Jun Ichi
AU - Ohashi, Yuji
AU - Suzuki, Kouji
PY - 2006/11/15
Y1 - 2006/11/15
N2 - The evaluation of periodic striae layers in TiO2-SiO2 ultra-low-expansion glasses, formed during production, is discussed through the measurement of leaky surface acoustic-wave (LSAW) velocities by the line-focus-beam (LFB) ultrasonic material-characterization system. The averaging effect associated with an LSAW propagation region interacting with periodic striae on a specimen surface was examined at 225 MHz, taking several specimens prepared with inclination angles of θ = 0,2, 5, 10, 20, and 90° to the plane of striae layers with a periodicity of 0.16mm. LSAW velocities corresponding to TiO2 concentrations in the glass were properly measured for the specimens with θ less than 10°, and the perpendicular specimen (θ = 90°) was suitable for accurate determination of the striae periodicities for LSAW propagation perpendicular to the striae plane.
AB - The evaluation of periodic striae layers in TiO2-SiO2 ultra-low-expansion glasses, formed during production, is discussed through the measurement of leaky surface acoustic-wave (LSAW) velocities by the line-focus-beam (LFB) ultrasonic material-characterization system. The averaging effect associated with an LSAW propagation region interacting with periodic striae on a specimen surface was examined at 225 MHz, taking several specimens prepared with inclination angles of θ = 0,2, 5, 10, 20, and 90° to the plane of striae layers with a periodicity of 0.16mm. LSAW velocities corresponding to TiO2 concentrations in the glass were properly measured for the specimens with θ less than 10°, and the perpendicular specimen (θ = 90°) was suitable for accurate determination of the striae periodicities for LSAW propagation perpendicular to the striae plane.
KW - CTE evaluation
KW - Extreme ultraviolet lithography system
KW - Leaky surface acoustic waves
KW - Line-focus-beam ultrasonic material-characterization system
KW - Striae evaluation
KW - TiO-doped SiO ultra-low-expansion glass
KW - Velocity measurement
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U2 - 10.1143/JJAP.45.8925
DO - 10.1143/JJAP.45.8925
M3 - Article
AN - SCOPUS:34547894290
SN - 0021-4922
VL - 45
SP - 8925
EP - 8927
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 11
ER -