Acoustic emission sensors using silicon mechanical resonators

Kengo Takata, Takashi Sasaki, Mitsutomo Nishizawa, Hiroshi Saito, Shinsuke Yamazaki, Daisuke Matsuura, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review


Ultrasonic sensors using cantilever beam and free-free beam resonators are designed and fabricated for acoustic emission (AE) sensing. The sensors are operated under the resonant conditions and the generated oscillation is detected by silicon piezoresistors. In order to investigate the air friction of the resonators, the quality factors are measured as a function of pressure. The sensitivities of the two resonators are compared. The cantilever beam resonator is vacuum-packaged by glass-silicon anodic bonding and the AE sensing test is carried out by the method of breaking pencil lead. The response time of the vacuum packaged sensor is also measured.

Original languageEnglish
Pages (from-to)484-489
Number of pages6
JournalIEEJ Transactions on Sensors and Micromachines
Issue number12
Publication statusPublished - 2015 Dec 1


  • Acoustic emission sensor
  • Piezoresistor
  • Q factor
  • Silicon resonator
  • Vacuum package


Dive into the research topics of 'Acoustic emission sensors using silicon mechanical resonators'. Together they form a unique fingerprint.

Cite this