Acoustic interference suppression of QCM sensor arrays utilizing phononic crystals

Yung Yu Chen, Li Chung Huang, Yu Ching Lin, Tsung Tsong Wu, Jia Hong Sun, Wei Shan Wang, Masayoshi Esashi

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    1 Citation (Scopus)


    In this paper, we propose a sensor array consisting of multiple quartz crystal microbalances (QCMs) surrounded by phononic crystals. Phononic crystals are utilized for isolating acoustic energy of individual bulk acoustic wave sensor and suppressing the interference. The resonance response of a QCM was calculated by finite element analysis. A square-lattice phononic crystal structure was designed to have a complete band gap covering the QCM's resonance frequency. Finally, the monolithic QCM sensor arrays with/without phononic crystals were fabricated by micromachining processes and measured to evaluate the isolation performance of the phononic crystals. As a result, the QCM has a resonance frequency of around 20.8 MHz when the AT-cut quartz plate is 80 μm thick. The designed phononic crystal structure, whose lattice constant and filling ratio are 100 μm and 0.475, has a complete band gap from 19.44 to 23.1 MHz. Besides, the QCM sensor arrays with phononic crystals were successfully fabricated by deep reactive ion etching. Measurement results show the phononic crystal with band gap indeed forbids effectively acoustic waves excited by QCMs and reduces spurious modes in the frequency response of the sensor array. Accordingly, the phononic crystal is verified to be capable of suppressing the acoustic interference between adjacent QCMs in a sensor array.

    Original languageEnglish
    Title of host publication2012 IEEE International Ultrasonics Symposium, IUS 2012
    Publication statusPublished - 2012
    Event2012 IEEE International Ultrasonics Symposium, IUS 2012 - Dresden, Germany
    Duration: 2012 Oct 72012 Oct 10

    Publication series

    NameIEEE International Ultrasonics Symposium, IUS
    ISSN (Print)1948-5719
    ISSN (Electronic)1948-5727


    Other2012 IEEE International Ultrasonics Symposium, IUS 2012


    • acoustic interference suppression
    • isolation
    • phononic crystal
    • sensor array

    ASJC Scopus subject areas

    • Acoustics and Ultrasonics


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