Advances in EELS spectroscopy by using new detector and new specimen preparation technologies

Christina Scheu, M. Gao, K. Van Benthem, S. Tsukimoto, S. Schmidt, W. Sigle, G. Richter, J. Thomas

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)


First results obtained with a Gatan UHV Enfina system, which was attached to a VG HB 501 UX dedicated STEM, are reported. The Enfina system is based on a CCD detector and offers, compared to the previously used photodiode array, a narrower point-spread function, higher sensitivity, and faster read-out capabilities. These improvements are demonstrated with electron energy-loss measurements on various oxides, such as Al2O3, TiO2 and SrTiO3. It is shown that a better energy resolution is achieved and that acquisition of high-energy absorption edges with a reasonable signal-to-noise ratio becomes possible. Furthermore, we report on the influence of the TEM specimen quality on the energy-loss spectra. Thin amorphous layers at the specimen surfaces, which are induced by ion-milling processes, can modify specific electron energy-loss near-edge structure features. We found that for the investigated ceramics the use of low-energy ion-milling systems is highly recommended, since the loss of energy-loss near-edge structure details by the presence of the amorphous layers is considerably reduced. This is especially true for very thin specimens.

Original languageEnglish
Pages (from-to)16-24
Number of pages9
JournalJournal of Microscopy
Issue number1
Publication statusPublished - 2003 Apr 1
Externally publishedYes


  • CCD-based detector
  • EELS
  • Specimen preparation

ASJC Scopus subject areas

  • Pathology and Forensic Medicine
  • Histology


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