Advances in short-wavelength X-ray multilayer optics: Toward high-throughput multi-mirror systems for the wavelengths < 10 nm

Igor A. Artyukov; Yegor A. Bugayev; Oleksandr Yu Devizenko; Ruslan M. Feshchenko; Tadashi Hatano; Yuri S. Kasyanov; Valeri V. Kondratenko; Yuri A. Uspenski; Alexander V. Vinogradov

doi:10.1117/12.734601

Advances in short-wavelength X-ray multilayer optics: Toward high-throughput multi-mirror systems for the wavelengths < 10 nm

Igor A. Artyukov, Yegor A. Bugayev, Oleksandr Yu Devizenko, Ruslan M. Feshchenko, Tadashi Hatano, Yuri S. Kasyanov, Valeri V. Kondratenko, Yuri A. Uspenski, Alexander V. Vinogradov

SRIS - SR Core Research Division

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

4 Citations (Scopus)

Abstract

This paper presents novel approaches and techniques in development and application of multi-mirror X-ray optical systems operating in the spectral region of "carbon window" (λ ∼ 4.5 nm). Two approaches for fabrication of the graded Co/C multilayer mirrors for Schwarzschild objective are presented. A pair of the spherical mirrors with Co/C multilayer coatings was tested in combination with scandium/carbon filters and laser produced plasma X-ray source for stereoimaging of low density materials at λ ∼ 4.5 nm.

Original language	English
Title of host publication	Soft X-Ray Lasers and Applications VII
DOIs	https://doi.org/10.1117/12.734601
Publication status	Published - 2007
Event	Soft X-Ray Lasers and Applications VII - San Diego, CA, United States Duration: 2007 Aug 29 → 2007 Aug 30

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6702
ISSN (Print)	0277-786X

Conference

Conference	Soft X-Ray Lasers and Applications VII
Country/Territory	United States
City	San Diego, CA
Period	07/8/29 → 07/8/30

Keywords

Carbon window
Low density materials
Mask-assisted magnetron sputtering
Schwarzschild objective
Soft X-ray imaging
X-ray multilayer optics

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10.1117/12.734601

Cite this

Artyukov, I. A., Bugayev, Y. A., Devizenko, O. Y., Feshchenko, R. M., Hatano, T., Kasyanov, Y. S., Kondratenko, V. V., Uspenski, Y. A., & Vinogradov, A. V. (2007). Advances in short-wavelength X-ray multilayer optics: Toward high-throughput multi-mirror systems for the wavelengths < 10 nm. In Soft X-Ray Lasers and Applications VII Article 67020V (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6702). https://doi.org/10.1117/12.734601

@inproceedings{5aea0f973c2b41b586f83a23f20f5fff,

title = "Advances in short-wavelength X-ray multilayer optics: Toward high-throughput multi-mirror systems for the wavelengths < 10 nm",

abstract = "This paper presents novel approaches and techniques in development and application of multi-mirror X-ray optical systems operating in the spectral region of {"}carbon window{"} (λ ∼ 4.5 nm). Two approaches for fabrication of the graded Co/C multilayer mirrors for Schwarzschild objective are presented. A pair of the spherical mirrors with Co/C multilayer coatings was tested in combination with scandium/carbon filters and laser produced plasma X-ray source for stereoimaging of low density materials at λ ∼ 4.5 nm.",

keywords = "Carbon window, Low density materials, Mask-assisted magnetron sputtering, Schwarzschild objective, Soft X-ray imaging, X-ray multilayer optics",

author = "Artyukov, {Igor A.} and Bugayev, {Yegor A.} and Devizenko, {Oleksandr Yu} and Feshchenko, {Ruslan M.} and Tadashi Hatano and Kasyanov, {Yuri S.} and Kondratenko, {Valeri V.} and Uspenski, {Yuri A.} and Vinogradov, {Alexander V.}",

year = "2007",

doi = "10.1117/12.734601",

language = "English",

isbn = "9780819468505",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "Soft X-Ray Lasers and Applications VII",

note = "Soft X-Ray Lasers and Applications VII ; Conference date: 29-08-2007 Through 30-08-2007",

}

Artyukov, IA, Bugayev, YA, Devizenko, OY, Feshchenko, RM, Hatano, T, Kasyanov, YS, Kondratenko, VV, Uspenski, YA & Vinogradov, AV 2007, Advances in short-wavelength X-ray multilayer optics: Toward high-throughput multi-mirror systems for the wavelengths < 10 nm. in Soft X-Ray Lasers and Applications VII., 67020V, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6702, Soft X-Ray Lasers and Applications VII, San Diego, CA, United States, 07/8/29. https://doi.org/10.1117/12.734601

Advances in short-wavelength X-ray multilayer optics: Toward high-throughput multi-mirror systems for the wavelengths < 10 nm. / Artyukov, Igor A.; Bugayev, Yegor A.; Devizenko, Oleksandr Yu et al.
Soft X-Ray Lasers and Applications VII. 2007. 67020V (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6702).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Advances in short-wavelength X-ray multilayer optics

T2 - Soft X-Ray Lasers and Applications VII

AU - Artyukov, Igor A.

AU - Bugayev, Yegor A.

AU - Devizenko, Oleksandr Yu

AU - Feshchenko, Ruslan M.

AU - Hatano, Tadashi

AU - Kasyanov, Yuri S.

AU - Kondratenko, Valeri V.

AU - Uspenski, Yuri A.

AU - Vinogradov, Alexander V.

PY - 2007

Y1 - 2007

N2 - This paper presents novel approaches and techniques in development and application of multi-mirror X-ray optical systems operating in the spectral region of "carbon window" (λ ∼ 4.5 nm). Two approaches for fabrication of the graded Co/C multilayer mirrors for Schwarzschild objective are presented. A pair of the spherical mirrors with Co/C multilayer coatings was tested in combination with scandium/carbon filters and laser produced plasma X-ray source for stereoimaging of low density materials at λ ∼ 4.5 nm.

AB - This paper presents novel approaches and techniques in development and application of multi-mirror X-ray optical systems operating in the spectral region of "carbon window" (λ ∼ 4.5 nm). Two approaches for fabrication of the graded Co/C multilayer mirrors for Schwarzschild objective are presented. A pair of the spherical mirrors with Co/C multilayer coatings was tested in combination with scandium/carbon filters and laser produced plasma X-ray source for stereoimaging of low density materials at λ ∼ 4.5 nm.

KW - Carbon window

KW - Low density materials

KW - Mask-assisted magnetron sputtering

KW - Schwarzschild objective

KW - Soft X-ray imaging

KW - X-ray multilayer optics

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DO - 10.1117/12.734601

M3 - Conference contribution

AN - SCOPUS:42149195633

SN - 9780819468505

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Soft X-Ray Lasers and Applications VII

Y2 - 29 August 2007 through 30 August 2007

ER -

Advances in short-wavelength X-ray multilayer optics: Toward high-throughput multi-mirror systems for the wavelengths < 10 nm

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