Hollow fibers for transmitting high-power ArF-excimer laser light are fabricated by Metal Organic Chemical Vapor Deposition (MOCVD) method. The hollow fibers with the inner diameter of 1 mm are fabricated by depositing an aluminum film on the inside of silica glass capillary by employing dimethyethylamine alane as the precursor. The fibers shows low-loss property, high durability, and high-energy threshold with the radiation of excimer lasers.
|Number of pages||6|
|Journal||Proceedings of SPIE - The International Society for Optical Engineering|
|Publication status||Published - 2000|
|Event||Biomedical Diagnostic, Guidance, and Surgical-Assist Systems II - San Jose, CA, USA|
Duration: 2000 Jan 25 → 2000 Jan 26