Aluminum-hollow fiber delivery system for excimer lasers

Yuji Matsuura, Takashi Yamamoto, Mitsunobu Miyagi

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


Hollow fibers for transmitting high-power ArF-excimer laser light are fabricated by Metal Organic Chemical Vapor Deposition (MOCVD) method. The hollow fibers with the inner diameter of 1 mm are fabricated by depositing an aluminum film on the inside of silica glass capillary by employing dimethyethylamine alane as the precursor. The fibers shows low-loss property, high durability, and high-energy threshold with the radiation of excimer lasers.

Original languageEnglish
Pages (from-to)292-297
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 2000
EventBiomedical Diagnostic, Guidance, and Surgical-Assist Systems II - San Jose, CA, USA
Duration: 2000 Jan 252000 Jan 26


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