TY - JOUR
T1 - Aluminum-hollow fiber delivery system for excimer lasers
AU - Matsuura, Yuji
AU - Yamamoto, Takashi
AU - Miyagi, Mitsunobu
PY - 2000
Y1 - 2000
N2 - Hollow fibers for transmitting high-power ArF-excimer laser light are fabricated by Metal Organic Chemical Vapor Deposition (MOCVD) method. The hollow fibers with the inner diameter of 1 mm are fabricated by depositing an aluminum film on the inside of silica glass capillary by employing dimethyethylamine alane as the precursor. The fibers shows low-loss property, high durability, and high-energy threshold with the radiation of excimer lasers.
AB - Hollow fibers for transmitting high-power ArF-excimer laser light are fabricated by Metal Organic Chemical Vapor Deposition (MOCVD) method. The hollow fibers with the inner diameter of 1 mm are fabricated by depositing an aluminum film on the inside of silica glass capillary by employing dimethyethylamine alane as the precursor. The fibers shows low-loss property, high durability, and high-energy threshold with the radiation of excimer lasers.
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M3 - Conference article
AN - SCOPUS:0033707230
SN - 0277-786X
VL - 3911
SP - 292
EP - 297
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
T2 - Biomedical Diagnostic, Guidance, and Surgical-Assist Systems II
Y2 - 25 January 2000 through 26 January 2000
ER -