TY - GEN
T1 - An AFM system with multi-mode scanning for large-area measurement
AU - Cui, Yuguo
AU - He, Gaofa
AU - Araic, Yoshikazu
AU - Gao, Wei
PY - 2010
Y1 - 2010
N2 - A novel atomic force microscope (AFM) system was constructed based on an air slide, an air spindle and a probe unit. It can carry out high-speed and large-area measurement for micro-structure surface with three scanning strategies of radial scanning, concentric scanning and spiral scanning. Using the AFM system, the micro-structure surface of a grating was measured with these scanning strategies. The measuring capability of them was researched by the experiment and the three measuring results were contrasted. The results show: compared with the other two scanning strategies, the spiral scanning mode can bring the best measuring image of the micro-structure profile, and it also spend the shortest time, it is only 50 seconds to finish scanning an circular area with 1 mm diameter.
AB - A novel atomic force microscope (AFM) system was constructed based on an air slide, an air spindle and a probe unit. It can carry out high-speed and large-area measurement for micro-structure surface with three scanning strategies of radial scanning, concentric scanning and spiral scanning. Using the AFM system, the micro-structure surface of a grating was measured with these scanning strategies. The measuring capability of them was researched by the experiment and the three measuring results were contrasted. The results show: compared with the other two scanning strategies, the spiral scanning mode can bring the best measuring image of the micro-structure profile, and it also spend the shortest time, it is only 50 seconds to finish scanning an circular area with 1 mm diameter.
KW - AFM
KW - High-speed measurement
KW - Large-area measurement
KW - Multi-mode scanning
UR - http://www.scopus.com/inward/record.url?scp=78650386845&partnerID=8YFLogxK
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U2 - 10.1117/12.865476
DO - 10.1117/12.865476
M3 - Conference contribution
AN - SCOPUS:78650386845
SN - 9780819480873
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies
T2 - 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Y2 - 26 April 2010 through 29 April 2010
ER -